The present invention relates to producing a stable sulfate and ultra pure electronic grade sulfuric acid production apparatus capable of preventing accidents.
Ultra pure electronic grade sulfuric acid production apparatus according to the present invention, the nitrogen gas to a steam evaporator to maintain a uniform temperature by supplying steam, the absorber (absorber) located at the bottom prevent the introduction of impurities contained in the external air introducing unit , in the ultra-pure electronic grade sulfuric acid production apparatus comprising a seal port for discharging the mixing device and the waste gas to mix the water and sulfuric acid, the steam evaporator is formed into a cylindrical shape, a third and fourth generation sulfur inside (SO ₃₎ is housed , the upper side and the inner peripheral surface on the inner housing that is provided with a plurality of valves; An outer housing that is configured to surround the outer side of the inner housing, forming a separation space between the inner housing; And the outer housing is formed in the outer peripheral surface, it comprises a steam inlet pipe for injection of steam to the spaced space between the outer housing and inner housing.
And the ultra-pure electronic grade sulfuric acid production apparatus according to the present invention by the above configuration will enable the iron based ultra pure electronic grade sulfuric acid production below 50ppt by injecting a uniform nitrogen at the bottom of the absorber, to prevent a rapid exothermic stable in the manufacture of sulfuric acid, and there is an effect capable of preventing accidents.