基本信息:
- 专利标题: 다기능 로드 포트 장치
- 专利标题(英):Multifunctional lord port apparatus
- 专利标题(中):多功能耶和华港口装置
- 申请号:KR1020130005853 申请日:2013-01-18
- 公开(公告)号:KR101476721B1 公开(公告)日:2015-01-06
- 发明人: 김봉호
- 申请人: 주식회사 엘에스텍
- 申请人地址: 경기도 용인시 수지구 신수로 *** , 에이-***(동천동, 유타워)
- 专利权人: 주식회사 엘에스텍
- 当前专利权人: 주식회사 엘에스텍
- 当前专利权人地址: 경기도 용인시 수지구 신수로 *** , 에이-***(동천동, 유타워)
- 代理人: 전종일
- 优先权: KR1020120048542 2012-05-08
- 主分类号: H01L21/677
- IPC分类号: H01L21/677
Multifunctional load port apparatus according to an embodiment of the present invention is mounted to the wafer storage unit or port stage for supporting the parts of the wafer storage mounted as separate from the receiving part and the wafer section; As it disposed in the bottom of the port stage portion while having a predetermined height and area as disposed within the port stage the port body and the port body section, for fixing parts portion is formed to protrude to said port stage, to said port stage If the wafer storage portion seat and a gas injection unit for injecting an injection gas into the compartment above the wafer while being disposed within said port body portion is formed to protrude to said port on the stage, when the wafer storage portion seated in the port stages and a gas discharge section for discharging the exhaust gas in the interior of the receiving the wafer, is disposed in the gas discharge section is disposed at the bottom of the impurity sensing unit, and the port stage portion for sensing the impurities contained in the exhaust gas the port If the wafer storage portion seated on the wafer stages can In a typical multi-function load port apparatus that includes the sensing of the pressure difference of the section parts of the load port comprising a differential pressure sensing unit to check the state of the storage portion the wafer, the load port portion to said wafer storage portion the port stage seat is fastened to the receiving part the wafer turbo pumping unit for maintaining a pressure differential between the compartment above the wafer pumped at a predetermined pressure to the exhaust gas pipe for discharging the exhaust gas and the exhaust gas duct during; further comprising the gas discharge unit that to check the status of the exhaust gas is to check the baechulyang exiting said off-gas to the wafer, if the baechulyang a reference amount or less discharged housing in a state in which continuous injection as the injection gas to the receiving part the wafer Article characterized in that it outputs a second check signal.
公开/授权文献:
- KR1020130125289A 다기능 로드 포트 장치 公开/授权日:2013-11-18