基本信息:
- 专利标题: 기판 처리 장비의 제어 장치 및 그 구동 방법
- 专利标题(英):Controlling apparatus for substrate processing equipment and method of operating the same
- 专利标题(中):用于基板加工设备的控制装置及其操作方法
- 申请号:KR1020130062385 申请日:2013-05-31
- 公开(公告)号:KR101460164B1 公开(公告)日:2014-11-10
- 发明人: 이경호 , 최창교
- 申请人: (주)세미즈
- 申请人地址: 경기도 용인시 처인구 남사면 원암로 ***
- 专利权人: (주)세미즈
- 当前专利权人: (주)세미즈
- 当前专利权人地址: 경기도 용인시 처인구 남사면 원암로 ***
- 代理人: 남승희
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/02
The invention first the main control unit and, including a data storage device that can be combined and separated from the main control device to include at least two disks and the same keep the data stored in the at least two disk system data and driving data stored, method comprising: providing a second disc with a disc and data stored readiness and, comprising the steps of driving a substrate processing equipment using the system data and the drive data in one disk, first the system data and the drive data on the disk 2 after storing in the disk, and detecting the first and the damage of the second disk, the method for driving the substrate processing equipment using the data of the undamaged disc, replacing the damaged disc with a normal disk corruption It proposes a process control device and a driving method of a substrate processing equipment, comprising the step of storing the data of the disk are not on the replacement disk.