基本信息:
- 专利标题： 비구면을 정밀 고해상도로 측정하는 방법
- 专利标题（英）：Method for accurate high-resolution measurements of aspheric surfaces
- 专利标题（中）：如何以高精度和分辨率测量非球面
- 申请号：KR1020137034713 申请日：2006-04-05
- 公开(公告)号：KR101459259B1 公开(公告)日：2014-11-12
- 发明人： 머피폴이. , 밀라디노빅드라기샤 , 포브스그렉더블유. , 데브리스게리엠. , 플라익존에프.
- 申请人： 퀘드 테크놀러지즈 인터내셔날, 인크.
- 申请人地址： *** N. Commons Drive, Aurora, Illinois *****, U.S.A.
- 专利权人： 퀘드 테크놀러지즈 인터내셔날, 인크.
- 当前专利权人： 퀘드 테크놀러지즈 인터내셔날, 인크.
- 当前专利权人地址： *** N. Commons Drive, Aurora, Illinois *****, U.S.A.
- 代理人： 김명신; 김민철; 박장규
- 优先权： US60/668,385 2005-04-05
- 国际申请： PCT/US2006/012527 2006-04-05
- 国际公布： WO2006107985 2006-10-12
- 主分类号： G01B9/02
- IPC分类号： G01B9/02 ; G01B11/30
The present invention relates to a system including a plurality of methods of measuring with the improved accuracy with a high spatial frequency on the wave front surface or, in particular, the aspherical surface in the test body part. The method includes measuring a test part of a plurality. One way is, if the test part is relocated with respect to the gauge, and a compensation and control of the focusing component of the measurement gauge to prevent loss of resolution and accuracy. Another method is unique slope of the gauge-extends the prior art averaging method for suppressing the frequency structure-dependent non-uniformity in the higher spatial bias. One of these methods is the higher part of the space to the bias of the gauge clearly - it includes mean for suppressing frequency structure; Another method to inhibit the direct bias of the gauge in the measurement. Any method may be used in combination of several guseongan tailored to specific tasks and geometry.
公开/授权文献:
- KR1020140008469A 비구면을 정밀 고해상도로 측정하는 방법 公开/授权日：2014-01-21
信息查询:
EspacenetIPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01B | 长度、厚度或类似线性尺寸的计量；角度的计量；面积的计量；不规则的表面或轮廓的计量 |
| ------G01B9/00 | 组中所列的及以采用光学测量方法为其特征的仪器 |
| --------G01B9/02 | .干涉仪 |