基本信息:
- 专利标题： 3차원 형상 측정장치의 높이 측정 방법
- 专利标题（英）：Method for measuring height of measuring target in three dimensional shape measuring apparatus
- 专利标题（中）：用于测量三维尺寸测量装置中测量目标的高度的方法
- 申请号：KR1020130057647 申请日：2013-05-22
- 公开(公告)号：KR101410220B1 公开(公告)日：2014-06-20
- 发明人： 정중기 , 홍덕화
- 申请人： 주식회사 고영테크놀러지
- 申请人地址： 서울특별시 금천구 가산디지털*로 **, **층 **층 (가산동, 한라시그마밸리)
- 专利权人： 주식회사 고영테크놀러지
- 当前专利权人： 주식회사 고영테크놀러지
- 当前专利权人地址： 서울특별시 금천구 가산디지털*로 **, **층 **층 (가산동, 한라시그마밸리)
- 代理人： 특허법인청맥
- 优先权： KR1020120054479 2012-05-22
- 主分类号： G01B11/25
- IPC分类号： G01B11/25 ; H05K13/08
3D height measurement method of the shape-measuring device includes: a first grating having a respective first equivalent wavelength from a plurality of first illumination devices and the first illumination unit and an alternating plurality of second lighting apparatus disposed such that the pattern light, and the first equivalent wavelength is irradiated with a second grating pattern light having a second, different equivalent wavelength in the object to be measured, first the first pattern image and corresponding to the lattice pattern optical second grid to the second pattern image corresponding to the pattern light obtaining, comprising in combination with each other a plurality of first and second illumination devices of one another adjacent the first and second illuminated first and second pattern images obtained by the device for generating combined pattern image, in combination using the step and the height of the measurement object is calculated for calculating the height of the measurement object in accordance with combination of the equivalent wavelength of the pattern image includes the steps of setting a representative height of the measurement object. Accordingly, it is possible to measure the height of the object exceeds the measurable height, it is possible to obtain the height of the measurement object that can be more accurate and reliable.
公开/授权文献:
- KR1020130130656A 3차원 형상 측정장치의 높이 측정 방법 公开/授权日：2013-12-02
信息查询:
EspacenetIPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01B | 长度、厚度或类似线性尺寸的计量；角度的计量；面积的计量；不规则的表面或轮廓的计量 |
| ------G01B11/00 | 以采用光学方法为特征的计量设备 |
| --------G01B11/24 | .用于计量轮廓或曲率 |
| ----------G01B11/25 | ..通过在物体上投影一个图形，例如莫尔（moiré）条纹 |