基本信息:
- 专利标题： 검사 데이터와 조합하여 설계 데이터를 활용하는 방법 및 시스템
- 专利标题（英）：Methods and systems for utilizing design data in combination with inspection data
- 申请号：KR1020137009231 申请日：2006-11-20
- 公开(公告)号：KR101370154B1 公开(公告)日：2014-03-04
- 发明人： 쿨카니아쇽 , 더피브라이언 , 마야카이스 , 로우즈고든
- 申请人： 케이엘에이-텐코 코포레이션
- 申请人地址： One Technology Drive, Milpitas, CA *****, U.S.A.
- 专利权人： 케이엘에이-텐코 코포레이션
- 当前专利权人： 케이엘에이-텐코 코포레이션
- 当前专利权人地址： One Technology Drive, Milpitas, CA *****, U.S.A.
- 代理人： 김태홍; 신정건
- 优先权： US11/561,659 2006-11-20; US11/561,735 2006-11-20; US60/737,947 2005-11-18; US60/738,290 2005-11-18
- 国际申请： PCT/US2006/061113 2006-11-20
- 国际公布： WO2007120280 2007-10-25
- 主分类号： G06F17/30
- IPC分类号： G06F17/30
Various methods and systems that utilize the design data are provided in combination with the check data. Design data, a computer for determining the location of inspection data within the space-implemented method includes the step of aligning the data obtained by the inspection system and the data in the predetermined alignment site for a site on the wafer alignment. The method includes determining a location of the sites on the wafer alignment in the design data space based on the position of a predetermined site of the alignment in the design data space is also included. In addition, the method also includes determining the location of the test data obtained with respect to the wafer by the inspection system in the design data space based on the position of the site on the wafer alignment in the design data space. In one embodiment, the location of the test data are the sub-pixel is determined by the accuracy.
公开/授权文献:
- KR1020130055013A 검사 데이터와 조합하여 설계 데이터를 활용하는 방법 및 시스템 公开/授权日：2013-05-27
信息查询:
EspacenetIPC结构图谱:
| G | 物理 |
| --G06 | 计算；推算；计数 |
| ----G06F | 电数字数据处理 |
| ------G06F17/00 | 特别适用于特定功能的数字计算设备或数据处理设备或数据处理方法 |
| --------G06F17/30 | .信息检索；及其数据库结构 |