基本信息:
- 专利标题： 테이퍼 형상 표면을 갖는 멤브레인 지지대를 구비한 마이크로기계 음향 변환기 및 제조 방법
- 专利标题（英）：Micromechanical sound transducer having a membrane support with tapered surface, and methods of manufacture
- 专利标题（中）：具有带表面的薄膜支撑的微型声音传感器及其制造方法
- 申请号：KR1020120032909 申请日：2012-03-30
- 公开(公告)号：KR101357312B1 公开(公告)日：2014-02-03
- 发明人： 베르젠스테판 , 쳉수 , 데헤알폰스 , 프리자볼프강 , 클라인볼프강 , 나와즈모신 , 세이델우베
- 申请人： 인피니언 테크놀로지스 아게
- 申请人地址： Am Campeon *-**, ***** Neubiberg, Germany
- 专利权人： 인피니언 테크놀로지스 아게
- 当前专利权人： 인피니언 테크놀로지스 아게
- 当前专利权人地址： Am Campeon *-**, ***** Neubiberg, Germany
- 代理人： 제일특허법인
- 优先权： US13/077,642 2011-03-31
- 主分类号： H04R19/00
- IPC分类号： H04R19/00 ; H01L29/84
The steps of method of manufacturing a micro-mechanical transducer includes a first depositing a first and a continuous layer of a second membrane support material a lower second etching rate and the etching rate on a first main surface of the substrate an array, each having It includes. Then, the deposition layer of the membrane material. Cavity is a joint is created in the substrate arranged from the side of the substrate opposite to the membrane supporting material and the membrane material until at least extending in the layer of the first membrane support material. The first and second membrane layers of the support material is etched to at least one of the first area positioned in the cavity of the extension portion, and also by the addition of etchant through the cavity to the second region surrounding the first region. Etch produces a tapered surface on the layer of the second membrane support material in the second region. At least a second layer of a second membrane support material is removed from the first area is continuously etched until exposing the layer of the membrane material.
公开/授权文献:
- KR1020120112208A 테이퍼 형상 표면을 갖는 멤브레인 지지대를 구비한 마이크로기계 음향 변환기 및 제조 방법 公开/授权日：2012-10-11