基本信息:
- 专利标题： 간섭 변조기의 결함을 시각적으로 검사하는 방법
- 专利标题（英）：Methods for visually inspecting interferometric modulators for defects
- 专利标题（中）：用于视觉检查干扰物质调制器的缺陷方法
- 申请号：KR1020117031172 申请日：2005-09-23
- 公开(公告)号：KR101227070B1 公开(公告)日：2013-02-08
- 发明人： 쿠밍스윌리엄제이. , 갤리브라이언제이.
- 申请人： 퀄컴 엠이엠에스 테크놀로지스, 인크.
- 申请人地址： **** Morehouse Drive, San Diego, CA *****-****, U.S.A.
- 专利权人： 퀄컴 엠이엠에스 테크놀로지스, 인크.
- 当前专利权人： 퀄컴 엠이엠에스 테크놀로지스, 인크.
- 当前专利权人地址： **** Morehouse Drive, San Diego, CA *****-****, U.S.A.
- 代理人： 유미특허법인
- 优先权： US11/217,580 2005-09-01; US60/613,537 2004-09-27
- 国际申请： PCT/US2005/034464 2005-09-23
- 国际公布： WO2006036903 2006-04-06
- 主分类号： G02B26/00
- IPC分类号： G02B26/00 ; B81B3/00 ; G09G3/00
The method of the present invention provides a method for the visual inspection of the array 60 of the interference modulator at various driving conditions. Between the method by driving the vertical column or horizontal heat plurality of single test pads or interference modulator through the inspection lid, such as a test pad 72, expected light output of the next, the array 60 to the actual light output It may comprise the step of observing the difference. This is in particular, for the example drive the horizontal column or vertical column set that are not adjacent, such as a vertical column 62, a horizontal open or vertical columns interposed, such as a vertical column 64 has a different state, and then, It may comprise the step of observing the optical output of the array 60.
公开/授权文献:
- KR1020120005056A 간섭 변조기의 결함을 시각적으로 검사하는 방법 公开/授权日：2012-01-13
信息查询:
EspacenetIPC结构图谱:
| G | 物理 |
| --G02 | 光学 |
| ----G02B | 光学元件、系统或仪器 |
| ------G02B26/00 | 利用可移动的或可变形的光学元件控制光的强度、颜色、相位、偏振或方向的光学器件或装置，例如，开关、选通、调制 |