基本信息:
- 专利标题： 계산기 홀로그램, 생성 방법 및 노광 장치
- 专利标题（英）：Computer generated hologram, generation method, and exposure apparatus
- 专利标题（中）：计算机生成的全息，生成方法和曝光装置
- 申请号：KR1020107016424 申请日：2008-12-08
- 公开(公告)号：KR101179939B1 公开(公告)日：2012-09-07
- 发明人： 마츠바라이사오
- 申请人： 캐논 가부시끼가이샤
- 申请人地址： **-*, Shimomaruko *-chome, Ohta-ku, Tokyo, Japan
- 专利权人： 캐논 가부시끼가이샤
- 当前专利权人： 캐논 가부시끼가이샤
- 当前专利权人地址： **-*, Shimomaruko *-chome, Ohta-ku, Tokyo, Japan
- 代理人： 권태복
- 优先权： JPJP-P-2007-341123 2007-12-28
- 国际申请： PCT/JP2008/072723 2008-12-08
- 国际公布： WO2009084409 2009-07-09
- 主分类号： H01L21/027
- IPC分类号： H01L21/027 ; G03F7/20
The present invention, and a plurality of anisotropic cell by giving a phase distribution to the incident light of the wave front includes providing a computer hologram for forming the light intensity distribution on the certain plane, and a hologram, respectively, the anisotropic medium to change a polarization state of the incident light, a plurality of isotropic cell containing the isotropic medium that does not change the state of polarization of the incident light, respectively, and a linearly polarized light component in the direction of the incident light of the first, and form a light intensity distribution of the first to the certain plane, the incident light the linearly polarized light component in a second direction perpendicular to the direction of the first to form a light intensity distribution of the first light intensity distribution is different in the second of the certain plane.
公开/授权文献:
- KR1020100103634A 계산기 홀로그램, 생성 방법 및 노광 장치 公开/授权日：2010-09-27
信息查询:
EspacenetIPC结构图谱:
| H | 电学 |
| --H01 | 基本电气元件 |
| ----H01L | 半导体器件；其他类目未包含的电固体器件 |
| ------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
| --------H01L21/02 | .半导体器件或其部件的制造或处理 |
| ----------H01L21/027 | ..未在H01L21/18或H01L21/34组中包含的为进一步的光刻工艺在半导体之上制作掩膜 |