基本信息:
- 专利标题: 이층기공구조를 가지는 진공척용 다공성 세라믹 소재 및 이의 제조방법
- 专利标题(英):The porous ceramics materials with double-layered pore structure for vacuum chuck and method for manufacturing the same
- 专利标题(中):用于真空吸盘的具有双层孔结构的多孔陶瓷材料及其制造方法
- 申请号:KR1020100052677 申请日:2010-06-04
- 公开(公告)号:KR101149350B1 公开(公告)日:2012-05-30
- 发明人: 송인혁 , 김해두 , 김영욱
- 申请人: 한국기계연구원
- 申请人地址: 대전광역시 유성구 가정북로 *** (장동)
- 专利权人: 한국기계연구원
- 当前专利权人: 한국기계연구원
- 当前专利权人地址: 대전광역시 유성구 가정북로 *** (장동)
- 代理人: 김기문
- 主分类号: C04B38/00
- IPC分类号: C04B38/00 ; C04B35/505 ; C04B35/565
It relates to a vacuum chuck material using a porous ceramic material, a vacuum chuck, and must have a high permeability material, which can be achieved via the open pore structure of tank. However, to suppress the vacuum chuck accuracy and avoid water absorption deformation of the pore structure of the vacuum chuck is required to finely divided material, but the finer pore structure results in a decrease in the air permeability. In order to solve this problem in the present invention, two-ply structure was a microstructure of a tank portion by the pore size and finer part. In particular, to make a fine structure that can minimize the deterioration of the permeability by producing a microporous structure layer in a cellular pore structure. That vacuum chuck porous ceramic material having a bi-layer pore structure is, by having multiple fine pores and comprises the absorption layer having a cellular porous structure, the supporter layer having a large coarse pore than the absorption layer, and the micropores ball and coarse pores It is characterized in that in communication with each other.
公开/授权文献:
- KR1020110133120A 이층기공구조를 가지는 진공척용 다공성 세라믹 소재 및 이의 제조방법 公开/授权日:2011-12-12