基本信息:
- 专利标题: 半導体チップ積層体の製造方法
- 专利标题(英):The method of manufacturing a semiconductor chip laminate
- 申请号:JP2010511003 申请日:2010-03-10
- 公开(公告)号:JPWO2010104125A1 公开(公告)日:2012-09-13
- 发明人: 明伸 早川 , 明伸 早川 , 石澤 英亮 , 英亮 石澤 , 幸平 竹田 , 幸平 竹田 , 良平 増井 , 良平 増井
- 申请人: 積水化学工業株式会社
- 专利权人: 積水化学工業株式会社
- 当前专利权人: 積水化学工業株式会社
- 优先权: JP2009056400 2009-03-10
- 主分类号: H01L21/52
- IPC分类号: H01L21/52 ; C09J5/00 ; H01L25/065 ; H01L25/07 ; H01L25/18
Substrate or other semiconductor chip coating step of coating a semiconductor component adhesive (1), the semiconductor chip laminating step of laminating a semiconductor chip through the coated semiconductor component adhesive (2), the substrate or other semiconductor chip a step of uniformly wetting and spreading a semiconductor component adhesive for the entire area to be bonded on the semiconductor chip (3), and a curing step of curing the semiconductor component adhesive (4), in the coating step (1) region for applying the semiconductor component adhesives are 40 to 90% of the region for bonding the semiconductor chip, a semiconductor component adhesive has spread wetted area immediately after the semiconductor chip laminating step (2) is joining the semiconductor chip 60% or more than 100% of the area, the viscosity of 0.5rpm by an E type viscometer semiconductor component adhesive in the step (3) to spread wet in 1~30Pa · s A semiconductor chip manufacturing method of the laminate that.
公开/授权文献:
信息查询:
EspacenetIPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
--------H01L21/02 | .半导体器件或其部件的制造或处理 |
----------H01L21/027 | ..未在H01L21/18或H01L21/34组中包含的为进一步的光刻工艺在半导体之上制作掩膜 |
------------H01L21/50 | ...应用H01L21/06至H01L21/326中的任一小组都不包含的方法或设备组装半导体器件的 |
--------------H01L21/52 | ....半导体在容器中的安装 |