基本信息:
- 专利标题: POSITIVE PHOTOSENSITIVE COMPOSITION
- 申请号:JP15699597 申请日:1997-06-13
- 公开(公告)号:JPH112895A 公开(公告)日:1999-01-06
- 发明人: KODAMA KUNIHIKO , AOSO TOSHIAKI , YAGIHARA MORIO
- 申请人: FUJI PHOTO FILM CO LTD
- 专利权人: FUJI PHOTO FILM CO LTD
- 当前专利权人: FUJI PHOTO FILM CO LTD
- 优先权: JP15699597 1997-06-13
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; C08L25/18 ; G03F7/00 ; G03F7/039 ; H01L21/027
摘要:
PROBLEM TO BE SOLVED: To obtain the positive photosensitive composition good in the profiles of a resist pattern and high in sensitivity and resolution and to prevent variation of performance with the lapse of time after exposure by incorporating a specified compound to be allowed to generate sulfonic acid by irradiation with activated rays or the like and a resin having groups each decomposable by action of acid and capable of increasing solubility in an alkaline developing solution. SOLUTION: This photosensitive composition contains the compound to be allowed to generate the sulfonic acid by irradiation with activated rays or radiations represented by formula I and the resin having groups each decomposable by action of acid and capable of increasing solubility in an alkaline developing solution. In formula I, each of R1 -R10 is an H or halogen atom or the like and at least one of them is a group represented by formula II or III; in formulae II and III, R' is an H atom or an alkyl group or the like; R" is an alkyl or aryl or the like; Y is a straight or branched alkylene group or the like; in formula I, X is an n-valent 1-20C straight or branched or cyclic alkylsulfonate ion or the like; and (n) is 1, 2, or 3.