发明专利
JPH0829433A MICRO-STRUCTURAL BODY, ITS FORMING METHOD, SCANNING PROBE MICROSCOPE AND INFORMATION PROCESSING DEVICE
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基本信息:
- 专利标题: MICRO-STRUCTURAL BODY, ITS FORMING METHOD, SCANNING PROBE MICROSCOPE AND INFORMATION PROCESSING DEVICE
- 申请号:JP16174594 申请日:1994-07-14
- 公开(公告)号:JPH0829433A 公开(公告)日:1996-02-02
- 发明人: SHIMADA YASUHIRO , FUSHIMI MASAHIRO , YAGI TAKAYUKI
- 申请人: CANON KK
- 专利权人: CANON KK
- 当前专利权人: CANON KK
- 优先权: JP16174594 1994-07-14
- 主分类号: G01B21/30
- IPC分类号: G01B21/30 ; G01N37/00 ; G01Q60/10 ; G01Q60/38 ; G01Q70/10 ; G01Q70/16 ; G01Q80/00 ; G11B9/14 ; G11B11/00
摘要:
PURPOSE:To provide a micro-structural body and its forming method, which is used as a probe or the like of a scanning probe microscope such as an STM (scanning tunneling microscope) and AFM (atomic force microscope), of which a production process is simple, and in which contamination of a tip (of probe) and deformation due to process are not caused, the tip is securely fixed, and wiring can be conducted to its rear face side. CONSTITUTION:In the micro-structural body composed of a lever 4 and a beam 5 which are formed by working a base board for working, an end of a tip 8 is protruded from the lever 4 and the tip 8 is formed continuously to a face of the lever 4 opposite to a support base board 2. This micro-structural body is formed by forming a groove of a shape corresponding to the lever 4 and the beam 5 on one side surface of the base board for working, forming the tip 8, joining the one side surface to the support base board 2, and applying etching from the other side surface of the base board for working to the groove part.
公开/授权文献:
- JP3406940B2 公开/授权日:2003-05-19
信息查询:
EspacenetIPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01B | 长度、厚度或类似线性尺寸的计量;角度的计量;面积的计量;不规则的表面或轮廓的计量 |
------G01B21/00 | 不适合于本小类其他组中所列的特定类型计量装置的计量设备或其零部件 |
--------G01B21/30 | .用于计量表面的粗糙度或不规则性 |