基本信息:
- 专利标题: 化合物、樹脂、リソグラフィー用下層膜形成材料、リソグラフィー用下層膜形成用組成物、リソグラフィー用下層膜、パターン形成方法、及び、化合物又は樹脂の精製方法
- 专利标题(英):Compounds, resin, the lower the film-forming material for lithography, underlayer film forming composition for lithography, underlying film for lithography, a pattern forming method, and a compound or resin purification method
- 专利标题(中):化合物,树脂,用于光刻的底涂层的材料,光刻下层膜形成用组合物,用于光刻中,图案形成方法,下层膜,以及化合物或树脂纯化方法
- 申请号:JP2016542787 申请日:2016-03-09
- 公开(公告)号:JP6028959B1 公开(公告)日:2016-11-24
- 发明人: 岡田 佳奈 , 堀内 淳矢 , 牧野嶋 高史 , 越後 雅敏
- 申请人: 三菱瓦斯化学株式会社
- 申请人地址: 東京都千代田区丸の内2丁目5番2号
- 专利权人: 三菱瓦斯化学株式会社
- 当前专利权人: 三菱瓦斯化学株式会社
- 当前专利权人地址: 東京都千代田区丸の内2丁目5番2号
- 代理人: 稲葉 良幸; 大貫 敏史; 内藤 和彦
- 优先权: JP2015050731 2015-03-13
- 国际申请: JP2016057438 JP 2016-03-09
- 主分类号: C07D405/04
- IPC分类号: C07D405/04 ; C08G61/12 ; G03F7/11 ; C07D209/86
Represented by the following formula (1), compounds.
[Formula 1]
(In the formula (1), X each independently, an oxygen atom indicates that a sulfur atom or an uncrosslinked, R
1 is each independently a hydrogen atom, a halogen group, a nitro group, an amino group, a hydroxyl group, an alkyl group having 1 to 30 carbon atoms, an alkenyl group having 2 to 30 carbon atoms, an aryl group having a carbon number of 6-40, and is selected from the group consisting of a combination thereof, wherein the alkyl group, the alkenyl group and the aryl group may contain an ether bond, ketone bond or an ester bond, R
2 is each independently a linear, branched or cyclic alkyl group having 1 to 30 carbon atoms , an aryl group having 6 to 40 carbon atoms, an alkenyl group having 2 to 30 carbon atoms, a thiol group or a hydroxyl group, wherein at least one of R
2 is a group containing a hydroxyl group or a thiol group, m, respectively independently, an integer from 1 to 7, p-is 0 or 1 each independently, q is each independently 0 to 4 integer, n is 0 or 1.)
公开/授权文献:
信息查询:
EspacenetIPC结构图谱:
C | 化学;冶金 |
--C07 | 有机化学 |
----C07D | 杂环化合物(高分子化合物入C08) |
------C07D405/00 | 杂环化合物,含有1个或多个以氧原子作为仅有的杂环原子的环,且含有1个或多个以氮原子作为仅有的杂环原子的环 |
--------C07D405/02 | .含有两个杂环 |
----------C07D405/04 | ..被环原子-环原子的键直接连接的 |