[Problem] by the small size of the layers, including a large number of identical parts, to provide a fluid control system that results in a functional flexibility and high reliability.
In A fluid control system for controlling guide the fluid, the fluid control system, are stacked together, a plurality of layers 204,206,208,209 which are combined to form a single air-tight unit, a plurality of layers of and a first pressure regulator 200 which is at least formed by a number, the first pressure regulator includes a flexible membrane 220 which is formed by one layer of a plurality of layers, the plurality of layers and a other of the valve member is biased formed spring by a layer 224,222,216, the spring of the valve member being spring-biased is formed by another layer of the plurality of layers, the first pressure regulator the part of which is actuated by the pressure of the fluid, the valve member being spring-biased is provided in the interior of a single sensitive unit.
.FIELD 4