发明专利
JP5302678B2 By reducing the thermal damage to the inspection system by avoiding saturation of the detector and the circuit, a system for extending the detection range, circuit, method
有权
基本信息:
- 专利标题： By reducing the thermal damage to the inspection system by avoiding saturation of the detector and the circuit, a system for extending the detection range, circuit, method
- 申请号：JP2008521588 申请日：2006-07-12
- 公开(公告)号：JP5302678B2 公开(公告)日：2013-10-02
- 发明人： ウォルターズ，クリスチャン・エイチ , ロマノフスキー，アナトリー , スロボドフ，アレキサンダー
- 申请人： ケーエルエー−テンカー コーポレイション
- 专利权人： ケーエルエー−テンカー コーポレイション
- 当前专利权人： ケーエルエー−テンカー コーポレイション
- 优先权： US18151905 2005-07-14; US18123705 2005-07-14; US18122805 2005-07-14
- 主分类号： G01N21/956
- IPC分类号： G01N21/956 ; H01J43/30 ; H03K17/945
摘要：
Inspection systems, circuits and methods are provided to enhance defect detection by addressing anode saturation as a limiting factor of the measurement detection range of a photomultiplier tube (PMT) detector. Inspection systems, circuits and methods are also provided to enhance defect detection by addressing saturation levels of the amplifier and analog-digital circuitry as a limiting factor of the measurement detection range of an inspection system. In addition, inspection systems, circuits, and methods are provided to enhance defect detection by reducing thermal damage to large particles by dynamically altering the incident laser beam power level supplied to the specimen during a surface inspection scan.
公开/授权文献:
信息查询:
EspacenetIPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01N | 借助于测定材料的化学或物理性质来测试或分析材料 |
| ------G01N21/00 | 利用光学手段，即利用红外光、可见光或紫外光来测试或分析材料 |
| --------G01N21/01 | .便于进行光学测试的装置或仪器 |
| ----------G01N21/88 | ..测试瑕疵、缺陷或污点的存在 |
| ------------G01N21/95 | ...特征在于待测物品的材料或形状 |
| --------------G01N21/956 | ....检测物品表面上的图案 |