PROBLEM TO BE SOLVED: To provide a fine particle manufacturing method for such as oxide, nitride and carbide capable of obtaining high-quality fine particles having even particle size with high productivity. SOLUTION: The fine particle manufacturing method, wherein the fine particles are produced by introducing a fine particle manufacturing material into a thermal plasma flame 24 to form a mixture in a gaseous condition and quenching the mixture in the gaseous condition, and the method of manufacturing the fine particle, wherein the process that introduces the fine particle manufacturing material into the thermal plasma flame disperses the fine particle manufacturing material in a flammable material to form slurry and changes the slurry to droplets to be introduced into the thermal plasma flame. As forms of the material to be introduced into the thermal plasma flame, powder, colloidal solution, liquid or the like are effective. COPYRIGHT: (C)2006,JPO&NCIPI