基本信息:
- 专利标题: Insulating film and electronic devices
- 申请号:JP2003197808 申请日:2003-07-16
- 公开(公告)号:JP3840207B2 公开(公告)日:2006-11-01
- 发明人: 秀喜 佐竹 , 達雄 清水
- 申请人: 株式会社東芝
- 专利权人: 株式会社東芝
- 当前专利权人: 株式会社東芝
- 优先权: JP2003197808 2003-07-16; JP2002285034 2002-09-30
- 主分类号: H01L27/04
- IPC分类号: H01L27/04 ; H01L29/78 ; H01L21/02 ; H01L21/28 ; H01L21/314 ; H01L21/316 ; H01L21/822 ; H01L29/12 ; H01L29/15 ; H01L29/51 ; H01L29/786
摘要:
An insulating film comprising: a first barrier layer; a well layer provided; and a second barrier layer is proposed. The first barrier layer consists of a material having a first bandgap and a first relative permittivity. The well layer is provided on the first barrier layer, and consists of a material having a second bandgap smaller than the first bandgap and having a second relative permittivity larger than first relative permittivity. Discrete energy levels are formed in the well layer by a quantum effect. The second barrier layer is provided on the well layer, and consists of a material having a third bandgap larger than the second bandgap and having a third relative permittivity smaller than second relative permittivity. Alternatively, an insulating film comprising: n (n being an integer larger than 2) layers of barrier layer consisting of a material having a bandgap larger than a first bandgap and having a relative permittivity smaller than a first relative permittivity; and (n-1) layers of well layers consisting of a material having a bandgap smaller than the first bandgap and having a relative permittivity larger than the first relative permittivity, discrete energy levels being formed in the well layer by a quantum effect, each of the barrier layers and each of the well layers being stacked by turns, and discrete energy levels being formed in each of the well layers by a quantum effect, is provided. Alternatively, an insulating film having a lattice mismatch within a range of plus-or-minus 1.5% to the substrate, and further having a high barrier and a large permittivity is provided.
公开/授权文献:
- JP2004179617A Insulating film and electronic element 公开/授权日:2004-06-24