基本信息:
- 专利标题: Optical lithography apparatus and method
- 申请号:JP15292199 申请日:1999-05-31
- 公开(公告)号:JP3472723B2 公开(公告)日:2003-12-02
- 发明人: エフ. クェイト カルヴァン , スターン デイヴィッド
- 申请人: アフィメトリックス インコーポレイテッド
- 专利权人: アフィメトリックス インコーポレイテッド
- 当前专利权人: アフィメトリックス インコーポレイテッド
- 优先权: US8733398 1998-05-29; US31877599 1999-05-26
- 主分类号: B01J19/00
- IPC分类号: B01J19/00 ; C40B40/06 ; C40B60/14 ; G01N37/00 ; G03F7/20 ; H01L21/027
摘要:
An improved optical photolithography system and method provides predetermined light patterns generated by a direct write system without the use of photomasks. The Direct Write System provides predetermined light patterns projected on a surface of a substrate (e.g., a wafer) by using a computer controlled spatial light modulator. Image patterns are stored in a computer and through electronic control of pixels in the spatial light modulator, directly illuminates the wafer to define a portion of the polymer array, rather than being defined by a pattern on a photomask. For example, in the Direct Write System using a micro-mirror array as the spatial light modulator, the angle of each pixel of micro-mirror array is computer controlled to reflect or not reflect an optical beam of suitable intensity to thereby image (printing) individual features on the substrate at each photolithographic step without using a photomask. The Direct Write System including a spatial light modulator is particularly useful for deprotecting features for polymer array synthesis (e.g. synthesis of DNA arrays).
公开/授权文献:
- JP2000040660A OPTICAL LITHOGRAPHY SYSTEM AND METHOD 公开/授权日:2000-02-08