基本信息:
- 专利标题: トランジスタの作製方法
- 专利标题(英):MANUFACTURING METHOD FOR TRANSISTOR
- 申请号:JP2021120431 申请日:2021-07-21
- 公开(公告)号:JP2021185598A 公开(公告)日:2021-12-09
- 发明人: 岡本 悟 , 笹川 慎也
- 申请人: 株式会社半導体エネルギー研究所
- 申请人地址: 神奈川県厚木市長谷398番地
- 专利权人: 株式会社半導体エネルギー研究所
- 当前专利权人: 株式会社半導体エネルギー研究所
- 当前专利权人地址: 神奈川県厚木市長谷398番地
- 优先权: JP2015041204 2015-03-03
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L21/8234 ; H01L27/06 ; H01L27/088 ; H01L29/788 ; H01L29/792 ; H01L21/8242 ; H01L27/108 ; H01L27/1156 ; H01L27/146 ; H01L29/786
To provide a microscopic transistor, a transistor with small parasitic capacitance, a transistor with a high frequency characteristic, and a semiconductor device including the transistor.SOLUTION: A transistor includes an oxide semiconductor 406b, a first conductor 404, a second conductor 416a1, a third conductor 416b, a first insulator 406c, and a second insulator 410. The first conductor includes a region where the first conductor and the oxide semiconductor overlap with each other through the first insulator. The second insulator includes an opening. In the opening, a side surface of the second insulator and a side surface of the first conductor include a region overlapping with each other through the first insulator. A part of a surface of the second conductor and a part of a surface of the third conductor are in contact with the first insulator in the opening. The oxide semiconductor includes a region where the oxide semiconductor and the second conductor overlap with each other and a region where the oxide semiconductor and the third conductor overlap with each other.SELECTED DRAWING: Figure 1
信息查询:
EspacenetIPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
--------H01L21/02 | .半导体器件或其部件的制造或处理 |
----------H01L21/027 | ..未在H01L21/18或H01L21/34组中包含的为进一步的光刻工艺在半导体之上制作掩膜 |
------------H01L21/18 | ...器件有由周期表第Ⅳ族元素或含有/不含有杂质的AⅢBⅤ族化合物构成的半导体,如掺杂材料 |
--------------H01L21/26 | ....用波或粒子辐射轰击的 |
----------------H01L21/335 | .....场效应晶体管 |
------------------H01L21/336 | ......带有绝缘栅的 |