基本信息:
- 专利标题: 流量測定システムおよび流量測定方法
- 专利标题(英):FLOW RATE MEASUREMENT SYSTEM AND FLOW RATE MEASUREMENT METHOD
- 申请号:JP2019141250 申请日:2019-07-31
- 公开(公告)号:JP2021025789A 公开(公告)日:2021-02-22
- 发明人: 永瀬 正明 , 滝本 昌彦 , 田中 一輝 , 西野 功二 , 池田 信一
- 申请人: 株式会社フジキン
- 申请人地址: 大阪府大阪市西区立売堀2丁目3番2号
- 专利权人: 株式会社フジキン
- 当前专利权人: 株式会社フジキン
- 当前专利权人地址: 大阪府大阪市西区立売堀2丁目3番2号
- 代理人: 谷田 龍一; 吉武 賢一
- 主分类号: G05D7/06
- IPC分类号: G05D7/06 ; G01F25/00
To provide a flow rate measurement system and a flow rate control method for optically measuring flow rate in a flow channel provided with a flow rate controller.SOLUTION: A flow rate measurement system 100 includes: a measurement cell 22 which is interposed on a flow channel at a downstream side of a flow rate controller 10 and in which gas flows; a light source 24a for generating light to be incident on the measurement cell; a photodetector 24b for detecting intensity of the light incident on the measurement cell from the light source and passing through the measurement cell; a downstream valve V2 provided downstream of the measurement cell; and a processing circuit 24d connected to the photodetector. The processing circuit calculates flow rate Q of the gas on the basis of change in the intensity I of the light passing through the measurement cell measured by the photodetector after closing the downstream valve V2 from a state in which the gas flows at the flow rate controlled by the flow rate controller 10.SELECTED DRAWING: Figure 1
信息查询:
EspacenetIPC结构图谱:
G | 物理 |
--G05 | 控制;调节 |
----G05D | 非电变量的控制或调节系统 |
------G05D7/00 | 流量控制 |
--------G05D7/06 | .以使用电装置为特征的 |