PROBLEM TO BE SOLVED: To provide a cryogenic refrigeration machine which effectively utilizes energy occurring during freezing processing and thereby improves the refrigeration efficiency.SOLUTION: A cryogenic refrigeration machine includes: a first refrigeration machine 10 including a compressor 12, a cold storage tube 40 where a refrigeration gas is suctioned from or discharged to the compressor 12, and a pulse tube 50 where a low temperature end is connected with a low temperature end 44 of the cold storage tube 40; a second refrigeration machine 100 which has output smaller than the first refrigeration machine 10; a connection pipeline 75 for suctioning and discharging the refrigeration gas between a high temperature end of the pulse pipe 50 and the second refrigeration machine 100; and a flow control valve 70 which is provided at the connection pipeline 75 and performs the flow control of the refrigeration gas between the pulse pipe 50 and the second refrigeration machine 100.