基本信息:
- 专利标题: Photoresist residue and polymer residue removing liquid composition
- 专利标题(中):光催化剂残留物和聚合物残留物去除液体组合物
- 申请号:JP2010198302 申请日:2010-09-03
- 公开(公告)号:JP2012058273A 公开(公告)日:2012-03-22
- 发明人: OWADA HIROHISA
- 申请人: Kanto Chem Co Inc , 関東化学株式会社
- 专利权人: Kanto Chem Co Inc,関東化学株式会社
- 当前专利权人: Kanto Chem Co Inc,関東化学株式会社
- 优先权: JP2010198302 2010-09-03
- 主分类号: G03F7/42
- IPC分类号: G03F7/42 ; C11D7/26 ; C11D7/50 ; H01L21/027 ; H01L21/304
摘要:
PROBLEM TO BE SOLVED: To provide a removing liquid composition for removing a photoresist residue and a polymer residue generated in a process for manufacturing a semiconductor circuit element having a metal wiring, and a method for removing residues using the same, in particular, a photoresist residue and polymer residue removing liquid composition which does not contain a nitrogen-containing organic hydroxy compound, ammonia and a fluorine compound, contains as a residue removing component an aliphatic polycarboxylic acid having excellent metal oxide-based residue removing properties and a melting point of 25°C or higher, and can inhibit recrystallization of the aliphatic polycarboxylic acid by evaporation of water after the solution adheres to a liquid ejection nozzle of a cleaning device, a cleaning tank and the periphery of a chamber, and a method for removing residues using the same.SOLUTION: The photoresist residue and polymer residue removing liquid composition containing an aliphatic polycarboxylic acid having a melting point of 25°C or higher contains a water-miscible organic solvent having a hydroxyl group within the structure and a vapor pressure at 20°C of 17 mmHg or less.
摘要(中):
要解决的问题:提供一种用于除去在具有金属布线的半导体电路元件的制造工艺中产生的光致抗蚀剂残渣和聚合物残渣的去除液体组合物,以及用于除去残留物的方法,特别是 不含氮有机羟基化合物,氨和氟化合物的光致抗蚀剂残渣和聚合物残渣除去液体组合物含有作为残渣除去成分的具有优异的金属氧化物基残渣除去性和熔融的脂肪族多元羧酸 点在25℃以上,并且可以在溶液粘附到清洁装置,清洗槽和室周边的液体喷射嘴之后,通过蒸发水来抑制脂族多元羧酸的再结晶,以及除去 残留物使用相同。 解决方案:含有熔点为25℃或更高的脂肪族多元羧酸的光致抗蚀剂残留物和聚合物残渣除去液体组合物含有在结构内具有羟基的水混溶性有机溶剂,并且蒸气压在20℃ 17mmHg以下。 版权所有(C)2012,JPO&INPIT