基本信息:
- 专利标题： Configuration of Ald reactor of the connecting portion
- 申请号：JP2011513013 申请日：2009-06-09
- 公开(公告)号：JP2011522969A 公开(公告)日：2011-08-04
- 发明人： ソイニネン，ペッカ , ヤウヒアイネン，ミカ
- 申请人： ベネク・オサケユキテュア
- 专利权人： ベネク・オサケユキテュア
- 当前专利权人： ベネク・オサケユキテュア
- 优先权： FI20085580 2008-06-12
- 主分类号： C23C16/455
- IPC分类号： C23C16/455
摘要：
The invention relates to an arrangement in connection with an ALD reactor comprising a reaction chamber, the arrangement comprising fittings for feeding a reaction gas to the reaction chamber and for suctioning the reaction gas back, and fittings for feeding a barrier gas. The fittings for feeding and suctioning back the reaction gas and for feeding the barrier gas comprise a middle element having multiple parallel channels which extend through the element, and a first and a second flow-reversing element arranged at ends of the middle element into which the channels open, the flow-reversing elements being arranged to combine the channels in the middle element so as to provide an interchannel flow.
公开/授权文献:
- JP5369178B2 Configuration of Ald reactor of the connecting portion 公开/授权日：2013-12-18