基本信息:
- 专利标题： Vibrating micromechanical sensor for angular velocity
- 专利标题（中）：振动微观传感器用于角速度
- 申请号：JP2011015625 申请日：2011-01-27
- 公开(公告)号：JP2011149944A 公开(公告)日：2011-08-04
- 发明人： BLOMQVIST ANSSI
- 申请人： Vti Technologies Oy , ヴェーテーイー テクノロジーズ オサケユキチュア
- 专利权人： Vti Technologies Oy,ヴェーテーイー テクノロジーズ オサケユキチュア
- 当前专利权人： Vti Technologies Oy,ヴェーテーイー テクノロジーズ オサケユキチュア
- 优先权： FI20041708 2004-12-31
- 主分类号： G01C19/56
- IPC分类号： G01C19/56
摘要：
PROBLEM TO BE SOLVED: To provide a vibrating micromechanical sensor which is highly reliable and capable of efficient measurement, and, in particular, which is compact, reliable and capable of efficient measurement.
SOLUTION: Seismic masses 1 and 2 are connected to a support area by means of springs or springs and stiff auxiliary structures, which give the seismic masses 1 and 2 a degree of freedom in relation to an axis of rotation perpendicular to a plane of a wafer formed by the seismic masses and a degree of freedom in relation to at least one axis of rotation parallel to the plane of the wafer.
COPYRIGHT: (C)2011,JPO&INPIT
摘要（中）：
SOLUTION: Seismic masses 1 and 2 are connected to a support area by means of springs or springs and stiff auxiliary structures, which give the seismic masses 1 and 2 a degree of freedom in relation to an axis of rotation perpendicular to a plane of a wafer formed by the seismic masses and a degree of freedom in relation to at least one axis of rotation parallel to the plane of the wafer.
COPYRIGHT: (C)2011,JPO&INPIT
要解决的问题：提供高度可靠并且能够高效测量的振动微机械传感器，特别是小型，可靠和能够高效测量的振动微机械传感器。 解决方案：地震质量1和2通过弹簧或弹簧和刚性辅助结构连接到支撑区域，使得地震质量1和2相对于垂直于平面的旋转轴线具有一定的自由度 由与地震质量形成的晶片和相对于平行于晶片平面的至少一个旋转轴线的自由度。 版权所有（C）2011，JPO＆INPIT
公开/授权文献:
信息查询:
EspacenetIPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01C | 测量距离、水准或者方位；勘测；导航；陀螺仪；摄影测量学或视频测量学 |
| ------G01C19/00 | 陀螺仪；带有振动部件的转动敏感装置；不带有运动部件的转动敏感装置 |
| --------G01C19/56 | .带有振动部件的转动敏感装置，例如音叉 |