发明专利
JP2009137835A Ceramic film and method of manufacturing the same, ferroelectric capacitor, semiconductor device, and other element
有权
基本信息:
- 专利标题： Ceramic film and method of manufacturing the same, ferroelectric capacitor, semiconductor device, and other element
- 专利标题（中）：陶瓷膜及其制造方法，电解电容器，半导体器件及其他元件
- 申请号：JP2008311926 申请日：2008-12-08
- 公开(公告)号：JP2009137835A 公开(公告)日：2009-06-25
- 发明人： NATORI EIJI , KIJIMA TAKESHI , FURUYAMA KOICHI , TAZAKI YUZO
- 申请人： Seiko Epson Corp , セイコーエプソン株式会社
- 专利权人： Seiko Epson Corp,セイコーエプソン株式会社
- 当前专利权人： Seiko Epson Corp,セイコーエプソン株式会社
- 优先权： JP2001178840 2001-06-13; JP2001193048 2001-06-26; JP2002086139 2002-03-26
- 主分类号： C30B29/22
- IPC分类号： C30B29/22 ; C04B35/42 ; C04B35/45 ; C04B35/457 ; C04B35/465 ; C04B35/472 ; C04B35/475 ; C04B35/491 ; C04B35/493 ; C04B35/495 ; C04B35/497 ; C04B35/624 ; C23C14/08 ; C23C16/40 ; C23C18/12 ; H01L21/314 ; H01L21/316 ; H01L21/8242 ; H01L21/8246 ; H01L27/105 ; H01L27/108 ; H01L41/22 ; H01L41/314 ; H01L41/317 ; H01L41/318 ; H01L41/39
摘要：
PROBLEM TO BE SOLVED: To provide a method of manufacturing a ceramic film, by which the surface morphology of the ceramic film can be improved. SOLUTION: The method of manufacturing the ceramic film includes forming such a film by crystallizing a ceramic raw material liquid which includes first and second raw material liquids which are different types. The first raw material liquid is a material liquid for producing a ferroelectric substance, and the second one is a material liquid for producing an oxide such as an ABO-type oxide. A solvent included in the first raw material liquid, and one included in the second one have polarities different from each other. The ceramic film is formed in such a way that the first and second raw material liquids are phase-separated so that first crystals formed of the first liquid are intermittently formed in a surface direction of the ceramic film and second crystals formed of the second liquid are formed so as to interpose between the first crystals. COPYRIGHT: (C)2009,JPO&INPIT
摘要（中）：
要解决的问题：提供一种制造陶瓷膜的方法，通过该方法可以改善陶瓷膜的表面形态。 解决方案：制造陶瓷膜的方法包括通过使包含不同类型的第一和第二原料液体的陶瓷原料液体结晶来形成这种膜。 第一原料液是用于制造铁电体的材料液，第二原料液是用于制造ABO型氧化物的氧化物的原料液。 包含在第一原料液中的溶剂，第二原料液中包含的溶剂的极性彼此不同。 陶瓷膜以这样的方式形成，使得第一和第二原料液体相分离，使得由第一液体形成的第一晶体在陶瓷膜的表面方向上间断地形成，并且由第二液体形成的第二晶体是 形成为插入在第一晶体之间。 版权所有（C）2009，JPO＆INPIT