发明专利
JP2009107064A Method of mechanical polishing, mechanical polishing device, and article to be polished
有权
基本信息:
- 专利标题： Method of mechanical polishing, mechanical polishing device, and article to be polished
- 专利标题（中）：机械抛光方法，机械抛光装置及抛光物品
- 申请号：JP2007281533 申请日：2007-10-30
- 公开(公告)号：JP2009107064A 公开(公告)日：2009-05-21
- 发明人： UCHIDA MASAHITO , TAKATO SHUJI , ASANO MUTSUMI
- 申请人： Tosoh Corp , 東ソー株式会社
- 专利权人： Tosoh Corp,東ソー株式会社
- 当前专利权人： Tosoh Corp,東ソー株式会社
- 优先权： JP2007281533 2007-10-30
- 主分类号： B24B7/04
- IPC分类号： B24B7/04
摘要：
PROBLEM TO BE SOLVED: To provide a method of polishing, working only a portion to be worked even if a projecting portion not needed to be worked appears on the surface of a glass substrate during the working when the surface of the glass substrate is polished by cutting-in operation. SOLUTION: The glass substrate 1 is held on a rotary table by a backing pad 14 made of a viscoelastic material. When the surface of the glass substrate 1 rotated by a polishing tool 15 having a fixed tool surface is polished by cutting-in operation, a time for which the polishing tool 15 passes the portion of the glass substrate 1 which must be worked is decreased, and a time for which the polishing tool passes the portion of the glass substrate not needed to be worked is increased. COPYRIGHT: (C)2009,JPO&INPIT
摘要（中）：
要解决的问题：为了提供一种抛光方法，即使在玻璃基板的表面在玻璃基板的表面工作时，即使在玻璃基板的表面上出现不需要加工的突出部分，也仅加工一部分， 通过切入操作进行抛光。 解决方案：玻璃基板1通过由粘弹性材料制成的衬垫14保持在转台上。 当通过切入操作抛光由具有固定工具表面的抛光工具15旋转的玻璃基板1的表面时，抛光工具15通过玻璃基板1的必须被加工的部分的时间减少， 并且增加了抛光工具通过玻璃基板的不需要加工的部分的时间。 版权所有（C）2009，JPO＆INPIT
公开/授权文献:
信息查询:
EspacenetIPC结构图谱:
| B | 作业；运输 |
| --B24 | 磨削；抛光 |
| ----B24B | 用于磨削或抛光的机床、装置或工艺；磨具磨损表面的修理或调节；磨削，抛光剂或研磨剂的进给 |
| ------B24B7/00 | 适用于磨削工件平面的机床或装置，包括抛光平面玻璃表面；及其附件 |
| --------B24B7/04 | .使用转动工作台 |