基本信息:
- 专利标题: Displacement measuring device
- 专利标题(中):位移测量装置
- 申请号:JP2007201283 申请日:2007-08-01
- 公开(公告)号:JP2009036637A 公开(公告)日:2009-02-19
- 发明人: KON MASATO , TANIGUCHI KAYOKO , TAMIYA HIDEAKI , ONODERA YASUHIKO , TSUCHIYA HIDEKI , KURODA AKIHIRO
- 申请人: Sony Corp , ソニー株式会社
- 专利权人: Sony Corp,ソニー株式会社
- 当前专利权人: Sony Corp,ソニー株式会社
- 优先权: JP2007201283 2007-08-01
- 主分类号: G01D5/245
- IPC分类号: G01D5/245
摘要:
PROBLEM TO BE SOLVED: To provide a displacement measuring device capable of performing displacement measurement that can realize high speed and high responsiveness and displacement measurements that have high accuracy and high resolution.
SOLUTION: The displacement measuring device includes a composite scale 2 for arranging a magnetic pattern 31 and a diffraction grating 32 in a measuring axis direction X, respectively; a magnetic detection part 11 for generating a first reproduction signal by detecting a magnetic field generated by the magnetic pattern 31 by being moved relative to the measuring axis direction X to the composite scale 2; a light source 12 for irradiating the diffraction grating 32 with light; and a detection head 3 having a light detecting part 13 generating a second reproduction signal, by detecting light diffracted by the diffraction grating 32. The device arranges the magnetic pattern 31 and the diffraction grating 32 so that the pitch of the first reproduction signal becomes larger than that of the second reproduction signal.
COPYRIGHT: (C)2009,JPO&INPIT
摘要(中):
SOLUTION: The displacement measuring device includes a composite scale 2 for arranging a magnetic pattern 31 and a diffraction grating 32 in a measuring axis direction X, respectively; a magnetic detection part 11 for generating a first reproduction signal by detecting a magnetic field generated by the magnetic pattern 31 by being moved relative to the measuring axis direction X to the composite scale 2; a light source 12 for irradiating the diffraction grating 32 with light; and a detection head 3 having a light detecting part 13 generating a second reproduction signal, by detecting light diffracted by the diffraction grating 32. The device arranges the magnetic pattern 31 and the diffraction grating 32 so that the pitch of the first reproduction signal becomes larger than that of the second reproduction signal.
COPYRIGHT: (C)2009,JPO&INPIT
要解决的问题:提供一种能够进行能够实现具有高精度和高分辨率的高速度,高响应度和位移测量的位移测量的位移测量装置。 解决方案:位移测量装置包括用于分别在测量轴线方向X上布置磁性图案31和衍射光栅32的复合刻度2; 磁检测部11,用于通过相对于测量轴方向X相对于复合标尺2检测由磁图31产生的磁场来产生第一再现信号; 用于用光照射衍射光栅32的光源12; 以及检测头3,其具有通过检测由衍射光栅32衍射的光而产生第二再现信号的光检测部分13.该装置布置磁图案31和衍射光栅32,使得第一再现信号的间距变大 比第二再现信号。 版权所有(C)2009,JPO&INPIT
信息查询:
EspacenetIPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01D | 非专用于特定变量的测量;不包含在其他单独小类中的测量两个或多个变量的装置;计费设备;未列入其他类目的测量或测试 |
------G01D5/00 | 用于传递传感构件的输出的机械装置;将传感构件的输出变换成不同变量的装置,其中传感构件的形式和特性不限制变换装置;非专用于特定变量的变换器 |
--------G01D5/02 | .采用机械装置 |
----------G01D5/244 | ..影响脉冲或脉冲序列的特性;产生脉冲或脉冲序列 |
------------G01D5/245 | ...应用脉冲数目可变的脉冲序列 |