基本信息:
- 专利标题: Healing algorithm
- 申请号:JP2007530649 申请日:2005-09-08
- 公开(公告)号:JP2008512710A 公开(公告)日:2008-04-24
- 发明人: イヴァンセン、ラルス
- 申请人: マイクロニック レーザー システムズ アクチボラゲット
- 专利权人: マイクロニック レーザー システムズ アクチボラゲット
- 当前专利权人: マイクロニック レーザー システムズ アクチボラゲット
- 优先权: US93773704 2004-09-09
- 主分类号: G03F1/08
- IPC分类号: G03F1/08 ; H01L21/027
One aspect of the present invention, in order to produce a pattern on the workpiece, there a way to re-form the sub-objects in at least one object in the pattern in the design data provided for the mask writing apparatus or direct writing device on, including how the object has a plurality of sliver in a first direction. The method, a) the task of generating a sliver list and work to repeat the following steps, namely b) a dynamic object in the object list as compared to the sliver in the sliver list Find adjacent sliver work, c) work to transfer the adjacent sliver from the sliver-list to the object list, d) work of the adjacent sliver merged with the dynamic object, e) any sliver in the sliver-list also the object including the task of repeating the operation for terminating the repetition when it is no longer adjacent to said dynamic object in the list. Another aspect of the present invention, the detailed description, shown in the drawings and claims.
信息查询:
EspacenetIPC结构图谱:
G | 物理 |
--G03 | 摄影术;电影术;利用了光波以外其他波的类似技术;电记录术;全息摄影术 |
----G03F | 图纹面的照相制版工艺,例如,印刷工艺、半导体器件的加工工艺;其所用材料;其所用原版;其所用专用设备 |
------G03F1/00 | 用于图纹面的照相制版的原版的制备 |
--------G03F1/08 | .原版带有无机成像层,例如,铬掩膜 |