基本信息:
- 专利标题: Equipment for loading and unloading the gas with respect to the chamber
- 申请号:JP2006527489 申请日:2004-09-24
- 公开(公告)号:JP2007507099A 公开(公告)日:2007-03-22
- 发明人: マイケル チャーニアック
- 申请人: ザ ビーオーシー グループ ピーエルシー
- 专利权人: ザ ビーオーシー グループ ピーエルシー
- 当前专利权人: ザ ビーオーシー グループ ピーエルシー
- 优先权: GB0322602 2003-09-26
- 主分类号: B67D99/00
- IPC分类号: B67D99/00 ; H01L21/31 ; C23C16/44 ; C23C16/455 ; H01L21/205 ; H01L21/283 ; H01L21/285 ; H01L21/3205 ; H01L21/768
摘要:
Apparatus comprising: a chamber having a chamber inlet and a chamber outlet; a first inlet for receiving a first gas stream; a second inlet for receiving a second gas stream; a first outlet for outputting the first gas stream to a first vacuum pump; a second outlet for outputting the second gas stream to a second vacuum pump; a conduit network for connecting the first inlet to the first outlet and for connecting the second inlet to the second outlet such that, for each gas stream, first and second flow paths are defined between its respective inlet and outlet, the first flow path passing through the chamber inlet and the chamber outlet, and the second flow path by-passing the chamber, and means for routing the gas streams through the network such that when one gas stream flows along its first flow path, the other gas stream flows along its second flow path.
公开/授权文献:
- JP5787459B2 原子層蒸着チャンバに対してガスを出し入れする装置及び方法 公开/授权日:2015-09-30
信息查询:
EspacenetIPC结构图谱:
B | 作业;运输 |
--B67 | 开启或封闭瓶子、罐或类似的容器;液体的贮运 |
----B67D | 不包含在其他类目中的液体分配、输送或转送装置 |
------B67D99/00 | 本小类其他各组中不包括的技术主题 |