基本信息:
- 专利标题: Surface inspection device
- 专利标题(中):表面检查装置
- 申请号:JP2003403725 申请日:2003-12-02
- 公开(公告)号:JP2005164398A 公开(公告)日:2005-06-23
- 发明人: KIMURA HAYATO , MORI HIDEO
- 申请人: Kirin Techno-System Corp , 株式会社キリンテクノシステム
- 专利权人: Kirin Techno-System Corp,株式会社キリンテクノシステム
- 当前专利权人: Kirin Techno-System Corp,株式会社キリンテクノシステム
- 优先权: JP2003403725 2003-12-02
- 主分类号: G01B11/30
- IPC分类号: G01B11/30 ; G01N21/954
摘要:
PROBLEM TO BE SOLVED: To inspect the inner surfaces of all of cylindrical bodies having different inner diameters by one surface inspection device.
SOLUTION: The distance dm between a sensor head 20 and a mirror 12 is varied so that a value (d) that is the sum of the distance dm and the distance dw from the axis of the cylindrical body 2 to the iner surface 2a thereof is made always constant with respect to the focal distance of the sensor head 20.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要(中):
SOLUTION: The distance dm between a sensor head 20 and a mirror 12 is varied so that a value (d) that is the sum of the distance dm and the distance dw from the axis of the cylindrical body 2 to the iner surface 2a thereof is made always constant with respect to the focal distance of the sensor head 20.
COPYRIGHT: (C)2005,JPO&NCIPI
要解决的问题:通过一个表面检查装置检查具有不同内径的所有圆柱体的内表面。 解决方案:传感器头20和反射镜12之间的距离dm变化,使得距离dm和从圆筒体2的轴线到内表面的距离dw之和的值(d) 2a相对于传感器头20的焦距总是恒定的。(C)版权所有(C)2005,JPO&NCIPI
公开/授权文献:
- JP4339094B2 Surface inspection equipment 公开/授权日:2009-10-07
信息查询:
EspacenetIPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01B | 长度、厚度或类似线性尺寸的计量;角度的计量;面积的计量;不规则的表面或轮廓的计量 |
------G01B11/00 | 以采用光学方法为特征的计量设备 |
--------G01B11/30 | .用于计量表面的粗糙度和不规则性 |