发明专利
JP2001261364A GLASS, PLASMA-RESISTANT MEMBER, ELECTROMAGNETIC WAVE TRANSMISSION WINDOW MEMBER, AND PLASMA PROCESSING EQUIPMENT
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基本信息:
- 专利标题： GLASS, PLASMA-RESISTANT MEMBER, ELECTROMAGNETIC WAVE TRANSMISSION WINDOW MEMBER, AND PLASMA PROCESSING EQUIPMENT
- 申请号：JP2000078950 申请日：2000-03-21
- 公开(公告)号：JP2001261364A 公开(公告)日：2001-09-26
- 发明人： TAKANO YUICHI , TERAO KOICHI
- 申请人： SUMITOMO METAL IND
- 专利权人： SUMITOMO METAL IND
- 当前专利权人： SUMITOMO METAL IND
- 优先权： JP2000078950 2000-03-21
- 主分类号： H05H1/46
- IPC分类号： H05H1/46 ; C03C3/04 ; C03C3/06 ; C03C3/083 ; C03C4/00 ; C03C14/00 ; C23C16/44 ; H01J37/32 ; H01L21/302 ; H01L21/3065
摘要：
PROBLEM TO BE SOLVED: To provide a material having excellent characteristics as the microwave transmission window of a plasma processing equipment similar to quartz glass on one hand and especially possessing corrosion resistance to fluorine- containing plasma on the other hand. SOLUTION: The glass possessing corrosion resistance to fluorine-containing plasma is composed of a first glass phase consisting of Si and O, and a second glass phase consisting of Si, Al and O. The mass ratio of Al to Si in the second glass phase is not smaller than 0.01. The glass is useful for a member for forming a window to introduce electromagnetic waves for a plasma processing equipment or the like.