发明公开
EP4074650A2 THIN FILM GETTER STRUCTURE HAVING MINIATURE HEATER AND MANUFACTURING METHOD THEREOF
审中-公开
基本信息:
- 专利标题： THIN FILM GETTER STRUCTURE HAVING MINIATURE HEATER AND MANUFACTURING METHOD THEREOF
- 申请号：EP22165761.2 申请日：2022-03-31
- 公开(公告)号：EP4074650A2 公开(公告)日：2022-10-19
- 发明人： Wang, Shinan , Lu, Tao
- 申请人： Shanghai Industrial Technology Research Institute
- 申请人地址： CN Shanghai 201800 Building 1 No.235 Chengbei Road Jiading District
- 代理机构： Gille Hrabal Partnerschaftsgesellschaft mbB Patentanwälte
- 优先权： CN202110414599 20210416
- 主分类号： B81B7/00
- IPC分类号： B81B7/00
摘要：
The present application provides a thin film getter structure having a miniature heater and a manufacturing method thereof, the thin film getter structure comprising: a substrate; a heater formed at a side of a main face of the substrate; and a getter thin film formed on a surface of the heater, wherein the heater comprises: a first insulating thin film; a thin film resistance formed on an upper surface of the first insulating thin film; and a second insulating thin film covering the thin film resistance, both ends of the thin film resistance being electrodes exposed from the second insulating thin film.