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基本信息:
- 专利标题: RESONATOR HAVING COMPOSITE ANNULAR STRUCTURE, FILTER AND ELECTRONIC DEVICE
- 申请号:EP20852149.2 申请日:2020-04-24
- 公开(公告)号:EP4016841A1 公开(公告)日:2022-06-22
- 发明人: YANG, Qingrui , PANG, Wei , ZHANG, Menglun
- 申请人: Tianjin University , Rofs Microsystem (Tianjin) Co., Ltd
- 申请人地址: CN Tianjin 300072 No.92 Weijin Road Nankai District; CN Tianjin 300462 No. 27 Xinye 5th Street West District Binhai New Area Development Zone
- 代理机构: Meyer-Dulheuer MD Legal Patentanwälte PartG mbB
- 优先权: CN201910754085 20190815
- 国际公布: WO2021027319 20210218
- 主分类号: H03H9/02
- IPC分类号: H03H9/02
摘要:
A bulk acoustic wave resonator, including: a substrate (110); an acoustic lens (120); a bottom electrode (130) that is disposed above the substrate (110); a top electrode (150) that is arranged opposite to the bottom electrode (130) and has an electrode connection part; and a piezoelectric layer (140) that is disposed above the bottom electrode (130) and between the bottom electrode (130) and the top electrode (150). An overlapping region of the acoustic lens (120), the bottom electrode (130), the piezoelectric layer (140) and the top electrode (150) in the thickness direction of the resonator constitutes an active region of the resonator. The edge of the top electrode (150) in the thickness direction of the resonator is provided with a composite annular structure which at least includes at least two annular structure layers. The at least two annular structure layers at least partially overlap at the interior of the active region in the thickness direction of the resonator, and at least one annular structure layer is a spatially discontinuous structure layer which is provided with a spatially discontinuous structure along the annular direction in the active region. The present invention further relates to a filter and an electronic device having the filter.
IPC结构图谱:
H | 电学 |
--H03 | 基本电子电路 |
----H03H | 阻抗网络,例如谐振电路;谐振器 |
------H03H9/00 | 包括机电或电声元件的网络,如谐振电路 |
--------H03H9/02 | .零部件 |