基本信息:
- 专利标题： ION BEAM SAMPLE PREPARATION AND COATING APPARATUS AND METHODS
- 申请号：EP19204570.6 申请日：2015-07-25
- 公开(公告)号：EP3618096A1 公开(公告)日：2020-03-04
- 发明人： Hunt, John Andrew , Coyle, Steven Thomas , Hassel-Shearer, Michael Patrick , Hosman, Thijs C.
- 申请人： Hunt, John Andrew , Coyle, Steven Thomas , Hassel-Shearer, Michael Patrick , Hosman, Thijs C.
- 申请人地址： 5794 W. Las Positas Blvd. Pleasanton, CA 94588 US
- 专利权人： Hunt, John Andrew,Coyle, Steven Thomas,Hassel-Shearer, Michael Patrick,Hosman, Thijs C.
- 当前专利权人： Hunt, John Andrew,Coyle, Steven Thomas,Hassel-Shearer, Michael Patrick,Hosman, Thijs C.
- 当前专利权人地址： 5794 W. Las Positas Blvd. Pleasanton, CA 94588 US
- 代理机构： Zacco Denmark A/S
- 优先权： US201462029563P 20140728; US201514809088 20150724
- 主分类号： H01J37/305
- IPC分类号： H01J37/305 ; H01J37/317 ; C23C14/46 ; C23C14/50 ; C23C14/56 ; C23C14/02 ; C23C14/54
摘要：
Ion beam sample preparation and coating apparatus and methods are described. A sample may be prepared in one or more ion beams and then a coating may be sputtered onto the prepared sample within the same apparatus. A vacuum transfer device may be used with the apparatus in order to transfer a sample into and out of the apparatus while in a controlled environment. Various methods to improve preparation and coating uniformity are disclosed including: rotating the sample retention stage; modulating the sample retention stage; variable tilt ion beam irradiating means, more than one ion beam irradiating means, coating thickness monitoring, selective shielding of the sample, and modulating the coating donor holder.
IPC结构图谱:
| H | 电学 |
| --H01 | 基本电气元件 |
| ----H01J | 放电管或放电灯 |
| ------H01J37/00 | 有把物质或材料引入使受到放电作用的结构的电子管,如为了对其检验或加工的 |
| --------H01J37/02 | .零部件 |
| ----------H01J37/305 | ..用于浇铸、熔化、蒸发或浸蚀的 |