![ACTUATION-AND-DETECTING MODULE](/ep/2019/10/02/EP3546917A1/abs.jpg.150x150.jpg)
基本信息:
- 专利标题: ACTUATION-AND-DETECTING MODULE
- 申请号:EP19153022.9 申请日:2019-01-22
- 公开(公告)号:EP3546917A1 公开(公告)日:2019-10-02
- 发明人: Mou, Hao-Jan , Lin, Ching-Sung , Han, Yung-Lung , Huang, Chi-Feng , Lee, Wei-Ming
- 申请人: Microjet Technology Co., Ltd
- 申请人地址: No. 28, R&D 2nd Rd, Science-based Industrial Park Hsinchu TW
- 专利权人: Microjet Technology Co., Ltd
- 当前专利权人: Microjet Technology Co., Ltd
- 当前专利权人地址: No. 28, R&D 2nd Rd, Science-based Industrial Park Hsinchu TW
- 代理机构: Uexküll & Stolberg
- 优先权: TW107111390 20180330
- 主分类号: G01N1/22
- IPC分类号: G01N1/22 ; F04B43/04 ; G01N33/00 ; H01L41/053 ; H04M1/21
摘要:
An actuation-and-detecting module is disclosed and includes a main body (1), a particle detecting base (2), plural actuators (31, 32) and sensors (41, 42, 43). The main body (1) has a first compartment (1a) divided into a first chamber (11d) and a second chamber (11e), a second compartment (lb) having a third chamber (12c) and a third compartment (1c) divided into a fourth chamber (13d) and a fifth chamber (13e) by a carrying partition (13c). The particle detecting base (2) is disposed between the fourth chamber (13d) and the carrying partition (13c) of the third compartment (1c). The first actuator (31) is disposed between the second chamber (11d) and a first partition (11c). The second actuator (32) is disposed within a receiving slot (22) of the particle detecting base (2). The first sensor (31) is disposed within the first chamber (11d). The second sensor (32) is disposed within the third chamber (12c) for detecting the air in the third chamber (12c). The third sensor (43) is disposed within a detecting channel (21) of the particle detecting base (2) for detecting the air in the detecting channel (21).