基本信息:
- 专利标题： IMAGE SENSOR STRUCTURE
- 申请号：EP18213239.9 申请日：2018-12-17
- 公开(公告)号：EP3505914A1 公开(公告)日：2019-07-03
- 发明人： CAI, Xiuyu , AGAH, Ali , FUNG, Tracy , DEHLINGER, Dietrich
- 申请人： Illumina, Inc.
- 申请人地址： 5200 Illumina Way San Diego, CA 92122 US
- 专利权人： Illumina, Inc.
- 当前专利权人： Illumina, Inc.
- 当前专利权人地址： 5200 Illumina Way San Diego, CA 92122 US
- 代理机构： Duxbury, Stephen
- 优先权： US201762610354P 20171226; NL2020615 20180319
- 主分类号： G01N21/64
- IPC分类号： G01N21/64 ; G01J1/44 ; G02B6/42 ; B01L3/00 ; H04N5/335 ; H01L27/146 ; G01N21/05
摘要：
An example image sensor structure (100) includes an image layer (108) with an array of light detectors (112) disposed therein. A device stack (126) is disposed over the image layer (108), with an array of light guides (130) disposed therein. Each light guide (130) is associated with at least one light detector of the array of light detectors (112). A passivation stack (104) is disposed over the device stack (126), comprising a passivation layer (142) and a chemical protection layer (144) disposed over the passivation layer (142), and preferably including a bottom surface (140) in direct contact with a top surface (132) of the light guides (130). An array of nanowells (120) is disposed in a top layer (144) of the passivation stack (104), with the contours of the nanowells (120) formed by a top layer (144) of the passivation stack (104). Each nanowell (120) is associated with a light guide (130). A crosstalk blocking metal structure (102/106) is disposed in the passivation stack (104), which reduces crosstalk within the passivation stack (104).
公开/授权文献:
IPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01N | 借助于测定材料的化学或物理性质来测试或分析材料 |
| ------G01N21/00 | 利用光学手段，即利用红外光、可见光或紫外光来测试或分析材料 |
| --------G01N21/01 | .便于进行光学测试的装置或仪器 |
| ----------G01N21/63 | ..光学激发的 |
| ------------G01N21/64 | ...荧光；磷光 |