![ELECTROLESS PALLADIUM/GOLD PLATING PROCESS](/ep/2019/05/29/EP3489385A1/abs.jpg.150x150.jpg)
基本信息:
- 专利标题: ELECTROLESS PALLADIUM/GOLD PLATING PROCESS
- 申请号:EP17858057.7 申请日:2017-08-02
- 公开(公告)号:EP3489385A1 公开(公告)日:2019-05-29
- 发明人: KATO, Tomohito , WATANABE, Hideto
- 申请人: Kojima Chemicals Co. Ltd.
- 申请人地址: 337-26 Kashiwabara Sayama-shi, Saitama 350-1335 JP
- 专利权人: Kojima Chemicals Co. Ltd.
- 当前专利权人: Kojima Chemicals Co. Ltd.
- 当前专利权人地址: 337-26 Kashiwabara Sayama-shi, Saitama 350-1335 JP
- 代理机构: Vossius & Partner Patentanwälte Rechtsanwälte mbB
- 优先权: JP2016197257 20161005
- 国际公布: WO2018066217 20180412
- 主分类号: C23C18/18
- IPC分类号: C23C18/18 ; C23C18/44 ; H05K3/18 ; H05K3/24
摘要:
It is an object of the present invention to provide an electroless palladium/gold plating process that can form a palladium/gold plating film selectively only on the copper without generating abnormal palladium precipitation even in a compact sized single electrode or a wiring with a narrow L/S. In order to solve the above-described problem, the electroless palladium/gold plating process comprises: a step (S4) of carrying out a copper surface electric potential adjusting treatment by immersing the insulating base material with a surface on which the copper has been disposed in a sulfur-containing aqueous solution containing one or more sulfur compounds selected from the group consisting of a thiosulfuric acid salt and a thiol; a step (S5) of carrying out an electroless palladium plating treatment on the insulating base material in which the surface electric potential of the copper has been adjusted to form a palladium plating film on the copper; and a step (S6) of carrying out an electroless gold plating treatment on the insulating base material in which the palladium plating film has been formed on the copper to form a gold plating film on the palladium plating film.
公开/授权文献:
- EP3489385B1 ELECTROLESS PALLADIUM/GOLD PLATING PROCESS 公开/授权日:2021-07-28