发明公开
EP3460093A3 COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE ARTICLES AND APPARATUS
审中-公开
基本信息:
- 专利标题： COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE ARTICLES AND APPARATUS
- 申请号：EP18192796.3 申请日：2016-02-13
- 公开(公告)号：EP3460093A3 公开(公告)日：2019-06-19
- 发明人： Hendrix, Bryan C. , Peters, David W. , Li, Weimin , Waldfried, Carlo , Cooke, Richard A. , Gunda, Nilesh , Lin, I-Kuan
- 申请人： Entegris, Inc.
- 申请人地址： 129 Concord Road Billerica, MA 01821 US
- 专利权人： Entegris, Inc.
- 当前专利权人： Entegris, Inc.
- 当前专利权人地址： 129 Concord Road Billerica, MA 01821 US
- 代理机构： Greaves Brewster LLP
- 优先权： US201562116181P 20150213; US201562167890P 20150528; US201562188333P 20150702; US201562221594P 20150921
- 主分类号： C23C16/04
- IPC分类号： C23C16/04 ; C23C16/56
摘要：
A structure, material, or apparatus comprising metal surface susceptible to formation of oxide, nitride, or halide of said metal thereon, the metal surface configured to be contacted in use or operation of said structure, material, or apparatus with gas, solid, or liquid that is reactive with said metal oxide, nitride, or halide to form a reaction product that is deleterious to said structure, material, or apparatus and its use or operation, wherein the metal surface is coated with a protective coating preventing reaction of the coated surface with the reactive gas.