基本信息:
- 专利标题： SYSTEM FOR AND METHOD OF FAST PULSE GAS DELIVERY
- 专利标题（中）：系统VERFAHREN ZUR SCHNELLEN IMPULSGASZUFUHR
- 申请号：EP15760881.1 申请日：2015-02-11
- 公开(公告)号：EP3117023A1 公开(公告)日：2017-01-18
- 发明人： DING, Junhua , L'BASSI, Michael , LEE, Tseng-Chung
- 申请人： MKS Instruments, Inc.
- 申请人地址： 2 Tech Drive, Suite 201 Andover, MA 01810 US
- 专利权人： MKS Instruments, Inc.
- 当前专利权人： MKS Instruments, Inc.
- 当前专利权人地址： 2 Tech Drive, Suite 201 Andover, MA 01810 US
- 代理机构： Wegner, Hans
- 优先权： US201414209216 20140313
- 国际公布： WO2015138073 20150917
- 主分类号： C23C16/455
- IPC分类号： C23C16/455 ; C23C16/52 ; C23C16/448
摘要：
A system for delivering pulses of a desired mass of gas to a tool, comprising: a mass flow controller including flow sensor, a control valve and a dedicated controller configured and arranged to receive a recipe of a sequence of steps for opening and closing the control valve so as to deliver as sequence of gas pulses as a function of the recipe. The mass flow controller is configured and arranged so as to operate in either one of at least two modes: as a traditional mass flow controller (MFC) mode or in a pulse gas delivery (PGD) mode. Further, the mass flow controller includes an input configured to receive an input signal; an output configured to provide an output signal; a communication port configured to receive program instructions; memory configured and arranged to receive programming data determining the programmed configuration of the mass flow controller as either a digital or analog configuration; and a processor/controller for operating the mass flow controller in accordance with the programmed configuration.
摘要（中）：
一种用于将期望质量的气体脉冲输送到工具的系统，包括：质量流量控制器，包括流量传感器，控制阀和专用控制器，其被配置和布置成接收用于打开和关闭控制的一系列步骤的配方 阀，以便作为配方的函数递送气体脉冲序列。 质量流量控制器被配置和布置成以至少两种模式中的任一种操作：作为传统质量流量控制器（MFC）模式或脉冲气体输送（PGD）模式。 此外，质量流量控制器包括被配置为接收输入信号的输入; 被配置为提供输出信号的输出; 配置为接收程序指令的通信端口; 存储器被配置和布置成接收将质量流量控制器的编程配置确定为数字或模拟配置的编程数据; 以及用于根据编程配置操作质量流量控制器的处理器/控制器。
公开/授权文献:
- EP3117023B1 SYSTEM FOR AND METHOD OF FAST PULSE GAS DELIVERY 公开/授权日：2019-04-10