EP3095126B8 ENDBLOCK FOR ROTATABLE TARGET WITH ELECTRICAL CONNECTION BETWEEN COLLECTOR AND ROTOR AT PRESSURE LESS THAN ATMOSPHERIC PRESSURE
有权
基本信息:
- 专利标题： ENDBLOCK FOR ROTATABLE TARGET WITH ELECTRICAL CONNECTION BETWEEN COLLECTOR AND ROTOR AT PRESSURE LESS THAN ATMOSPHERIC PRESSURE
- 申请号：EP14827991.2 申请日：2014-12-30
- 公开(公告)号：EP3095126B8 公开(公告)日：2018-02-14
- 发明人： GALAN, Gilbert , USELDING, Jean-Philippe , COMANS, Guy , SCHLOREMBERG, Marcel
- 申请人： Guardian Europe S.à.r.l. , Guardian Glass, LLC
- 申请人地址： Atrium Business Park Extimus Building 19, rue du Puits Romain 8070 Bertrange LU
- 专利权人： Guardian Europe S.à.r.l.,Guardian Glass, LLC
- 当前专利权人： Guardian Europe S.à.r.l.,Guardian Glass, LLC
- 当前专利权人地址： Atrium Business Park Extimus Building 19, rue du Puits Romain 8070 Bertrange LU
- 代理机构： Hess, Peter K. G.
- 优先权： US201414153658 20140113
- 国际公布： WO2015105711 20150716
- 主分类号： H01J37/34
- IPC分类号： H01J37/34 ; H01J37/32 ; C23C14/35
摘要：
An endblock for a rotatable sputtering target, such as a rotatable magnetron sputtering target, is provided. A sputtering apparatus, including one or more such endblock(s), includes locating the electrical contact(s) (e.g., brush(es)) between the collector and rotor in the endblock(s) in an area under vacuum (as opposed to in an area at atmospheric pressure).