发明公开
EP3062341A3 SEMICONDUCTOR DEVICE WITH AN ELECTRODE STRUCTURE COMPRISING AN ALUMINIUM OR ALUMINIUM ALLOY LAYER WITH {110} TEXTURE, METHOD OF MANUFACTURING SAID SEMICONDUCTOR DEVICE AND POWER CONVERSION DEVICE COMPRISING SAID SEMICONDUCTOR DEVICE
审中-公开
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基本信息:
- 专利标题: SEMICONDUCTOR DEVICE WITH AN ELECTRODE STRUCTURE COMPRISING AN ALUMINIUM OR ALUMINIUM ALLOY LAYER WITH {110} TEXTURE, METHOD OF MANUFACTURING SAID SEMICONDUCTOR DEVICE AND POWER CONVERSION DEVICE COMPRISING SAID SEMICONDUCTOR DEVICE
- 专利标题(中):与电极结构的半导体元件,包括铝或铝合金层{110}织构,用于生产半导体部件和功率转换装置,其包括半导体元件
- 申请号:EP16157345.6 申请日:2016-02-25
- 公开(公告)号:EP3062341A3 公开(公告)日:2016-11-09
- 发明人: FURUKAWA, Tomoyasu , SHIRAISHI, Masaki , NAKANO, Hiroshi , MORITA, Toshiaki
- 申请人: Hitachi Power Semiconductor Device, Ltd.
- 申请人地址: 2-2 Omika-cho 5-chome Hitachi-shi, Ibaraki 319-1221 JP
- 专利权人: Hitachi Power Semiconductor Device, Ltd.
- 当前专利权人: Hitachi Power Semiconductor Device, Ltd.
- 当前专利权人地址: 2-2 Omika-cho 5-chome Hitachi-shi, Ibaraki 319-1221 JP
- 代理机构: Beetz & Partner mbB
- 优先权: JP2015036099 20150226
- 主分类号: H01L23/482
- IPC分类号: H01L23/482 ; H01L23/485 ; H01L21/60 ; H01L25/065 ; H01L21/98 ; H02M7/5387
摘要:
A semiconductor device (200, 300, 400) includes a semiconductor substrate (108, 208) in which a semiconductor element (150) is formed, an electrode structure (151, 202, 207) provided on a first surface (108d) of the semiconductor substrate (108, 208) to be electrically connected to the semiconductor element (150) and in which a first Al metal layer (105) composed of Al or Al alloy, a Cu diffusion-prevention layer (107) composed of e.g. Ti, TiN, TiW or W, a second Al metal layer (106) composed of Al or Al alloy and a Ni, Cu or Cu alloy layer (104) are formed in this order, and a conductive member (102) which is bonded to the electrode structure (151, 202, 207) via a sintered copper layer (103) disposed on a surface (104a) of the Ni, Cu or Cu alloy layer (104). In this semiconductor device, a crystal plane orientation of Al crystal grains on a surface (106a) of the second Al metal layer (106) is principally on the (110) plane. The semiconductor device (200) may comprise a second electrode structure (152) on the second surface (108e) of the semiconductor substrate (108), also formed of the layers (105), (107), (106) and (104) and bonded to a conductive member (102) via a sintered copper layer (103). Alternatively, the semiconductor device (300, 400) may comprise a plurality of semiconductor elements such as transistors, diodes and resistive elements formed on a semiconductor LSI chip (201, 205, 206) and a plurality of input/output electrode pads (202, 207) each formed of the layers (105), (107), (106) and (104). The LSI chip (201, 205, 206) may be bonded to another semiconductor LSI chip (205, 206), also having electrode pads (202, 207) formed of the layers (105), (107), (106) and (104), and/or to a conductive member (102) via a sintered copper layer (103).
公开/授权文献:
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L23/00 | 半导体或其他固态器件的零部件 |
--------H01L23/34 | .冷却装置;加热装置;通风装置或温度补偿装置 |
----------H01L23/482 | ..由不可拆卸地施加到半导体本体上的内引线组成的 |