发明公开
EP3062341A2 SEMICONDUCTOR DEVICE WITH AN ELECTRODE STRUCTURE COMPRISING AN ALUMINIUM OR ALUMINIUM ALLOY LAYER WITH {110} TEXTURE, METHOD OF MANUFACTURING SAID SEMICONDUCTOR DEVICE AND POWER CONVERSION DEVICE COMPRISING SAID SEMICONDUCTOR DEVICE
审中-公开
![SEMICONDUCTOR DEVICE WITH AN ELECTRODE STRUCTURE COMPRISING AN ALUMINIUM OR ALUMINIUM ALLOY LAYER WITH {110} TEXTURE, METHOD OF MANUFACTURING SAID SEMICONDUCTOR DEVICE AND POWER CONVERSION DEVICE COMPRISING SAID SEMICONDUCTOR DEVICE](/ep/2016/08/31/EP3062341A2/abs.jpg.150x150.jpg)
基本信息:
- 专利标题: SEMICONDUCTOR DEVICE WITH AN ELECTRODE STRUCTURE COMPRISING AN ALUMINIUM OR ALUMINIUM ALLOY LAYER WITH {110} TEXTURE, METHOD OF MANUFACTURING SAID SEMICONDUCTOR DEVICE AND POWER CONVERSION DEVICE COMPRISING SAID SEMICONDUCTOR DEVICE
- 专利标题(中):与电极结构的半导体元件,包括铝或铝合金层{110}织构,用于生产半导体部件和功率转换装置,其包括半导体元件
- 申请号:EP16157345.6 申请日:2016-02-25
- 公开(公告)号:EP3062341A2 公开(公告)日:2016-08-31
- 发明人: FURUKAWA, Tomoyasu , SHIRAISHI, Masaki , NAKANO, Hiroshi , MORITA, Toshiaki
- 申请人: Hitachi Power Semiconductor Device, Ltd.
- 申请人地址: 2-2 Omika-cho 5-chome Hitachi-shi, Ibaraki 319-1221 JP
- 专利权人: Hitachi Power Semiconductor Device, Ltd.
- 当前专利权人: Hitachi Power Semiconductor Device, Ltd.
- 当前专利权人地址: 2-2 Omika-cho 5-chome Hitachi-shi, Ibaraki 319-1221 JP
- 代理机构: Beetz & Partner mbB
- 优先权: JP2015036099 20150226
- 主分类号: H01L23/482
- IPC分类号: H01L23/482 ; H01L23/485 ; H01L21/60 ; H01L25/065 ; H01L21/98 ; H02M7/5387
摘要:
A semiconductor device (200, 300, 400) includes a semiconductor substrate (108, 208) in which a semiconductor element (150) is formed, an electrode structure (151, 202, 207) provided on a first surface (108d) of the semiconductor substrate (108, 208) to be electrically connected to the semiconductor element (150) and in which a first Al metal layer (105) composed of Al or Al alloy, a Cu diffusion-prevention layer (107) composed of e.g. Ti, TiN, TiW or W, a second Al metal layer (106) composed of Al or Al alloy and a Ni, Cu or Cu alloy layer (104) are formed in this order, and a conductive member (102) which is bonded to the electrode structure (151, 202, 207) via a sintered copper layer (103) disposed on a surface (104a) of the Ni, Cu or Cu alloy layer (104). In this semiconductor device, a crystal plane orientation of Al crystal grains on a surface (106a) of the second Al metal layer (106) is principally on the (110) plane. The semiconductor device (200) may comprise a second electrode structure (152) on the second surface (108e) of the semiconductor substrate (108), also formed of the layers (105), (107), (106) and (104) and bonded to a conductive member (102) via a sintered copper layer (103). Alternatively, the semiconductor device (300, 400) may comprise a plurality of semiconductor elements such as transistors, diodes and resistive elements formed on a semiconductor LSI chip (201, 205, 206) and a plurality of input/output electrode pads (202, 207) each formed of the layers (105), (107), (106) and (104). The LSI chip (201, 205, 206) may be bonded to another semiconductor LSI chip (205, 206), also having electrode pads (202, 207) formed of the layers (105), (107), (106) and (104), and/or to a conductive member (102) via a sintered copper layer (103).
摘要(中):
一种半导体器件(200,300,400)包括设置在所述第一表面(108D)(108,208),其中的半导体元件(150)形成在半导体衬底,对电极结构(151,202,207) 半导体衬底(108,208)以电连接到半导体元件(150),并且其中EC组成Al或Al合金,Cu-扩散防止层(107)组成的第一Al金属层(105) Al或Al合金和镍,铜或铜合金层(104)组成的钛,氮化钛,TIW或W,第二Al的金属层(106)形成在该顺序和一个导电构件(102),其被键合 经由设置在所述的Ni,Cu或Cu合金层(104)的表面(104A)上的烧结铜层(103)的电极结构(151,202,207)。 在该半导体装置中,第二Al的金属层(106)的表面(106A)上的晶粒Al的晶面取向主要是在(110)平面。 的半导体器件(200)可包括第二电极结构(152)的半导体衬底(108)的第二表面(108E)上,如此形成的层(105)(107)(106)和(104) 并结合到经由烧结铜层(103)的导电性部件(102)。 可替代地,半导体器件(300,400)可包括半导体元件的多元性:如晶体管,二极管和形成的半导体LSI芯片(201,205,206)和输入/输出电极衬垫有多个(202上的电阻元件, (207)每个所形成的层105)(107)(106)和(104)组成。 LSI芯片(201,205,206)可键合到另一个半导体LSI芯片(205,206),所以具有电极焊盘(202,207)形成的层(105)(107)(106)和( (104)和/或通过烧结铜层(103的导电构件102))。
公开/授权文献:
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L23/00 | 半导体或其他固态器件的零部件 |
--------H01L23/34 | .冷却装置;加热装置;通风装置或温度补偿装置 |
----------H01L23/482 | ..由不可拆卸地施加到半导体本体上的内引线组成的 |