发明公开
EP2940178A4 METHOD FOR PREPARING AL2O2 COATING ON SURFACE OF SILICON -NITRIDE -CUTTING TOOL BY USING PVD,AND COMPOSITE COATING METHOD
审中-公开

基本信息:
- 专利标题: METHOD FOR PREPARING AL2O2 COATING ON SURFACE OF SILICON -NITRIDE -CUTTING TOOL BY USING PVD,AND COMPOSITE COATING METHOD
- 专利标题(中):一种用于生产AL2O2涂层通过PVD耐磨复合涂层工艺氮化硅切削刀具的表面
- 申请号:EP13867666 申请日:2013-09-30
- 公开(公告)号:EP2940178A4 公开(公告)日:2016-08-17
- 发明人: LONG YING , WANG QIMIN , WANG CHENGYONG
- 申请人: WU SHANGHUA
- 专利权人: WU SHANGHUA
- 当前专利权人: WU SHANGHUA
- 优先权: US201261745871 2012-12-26
- 主分类号: C23C28/04
- IPC分类号: C23C28/04 ; C04B35/584 ; C23C14/08 ; C23C28/00
摘要:
A method for preparing an aluminum-oxide single-layer coating or multi-layer coating on the surface of silicon-nitride ceamic cutting tool by using a Physical Vapor Depositon (PVD) process. There are two methods for preparing the aluminum-oxdie coating by using the PVD techonology: one is depositing an aluminum-oxide layer through reactive sputtering of Al target by using a bipolar pulse power source and a Dual Magnetron Sputtering (DMS) technology in the O 2 atmosphere or Ar-O 2 mixed atmosphere; the other one is sputtering, by using DMS technology in the Ar atmosphere or Ar-O 2 mixed atmosphere, an aluminum-oxide ceramic target conductive doping, and then preparing the aluminum-oxide coating. With the two methods, a single-layer aluminum-oxide coating, a nitride and aluminum-oxide composite coating, or a multi-layer or nano composite coating obtained by alternately depositing nitride and alumimum oxide is prepared, the aluminum-oxide being ±-Al 2 O 3 , ²-Al 2 O 3 , ³-Al 2 O 3 , or amorphous Al 2 O 3 . The hard nitride coating in the multi-layer composite aluminum-oxide coating comprises a two-element nitride coating, a three-element nitride coating, multi-element nitride coating, or a multi-layer composite thereof of a nano coating.