
基本信息:
- 专利标题: MANUFACTURING METHOD OF A FILM-BONDED STRUCTURE
- 申请号:EP15161003.7 申请日:2015-03-26
- 公开(公告)号:EP2924014B1 公开(公告)日:2018-10-10
- 发明人: MORIYAMA, Satoko , MURAKAMI, Mika , YOSHIOKA, Kunihiko , SAKAKIBARA, Hironori
- 申请人: NGK Insulators, Ltd.
- 申请人地址: 2-56, Suda-cho, Mizuho-ku Nagoya-city, Aichi 467-8530 JP
- 专利权人: NGK Insulators, Ltd.
- 当前专利权人: NGK Insulators, Ltd.
- 当前专利权人地址: 2-56, Suda-cho, Mizuho-ku Nagoya-city, Aichi 467-8530 JP
- 代理机构: Naylor, Matthew John
- 优先权: JP2014068564 20140328; JP2014200788 20140930
- 主分类号: C04B35/119
- IPC分类号: C04B35/119 ; C04B35/488 ; C04B35/626 ; C04B35/634 ; C04B37/00 ; B32B18/00 ; C04B35/622 ; G01N27/407 ; B28B1/00
摘要:
A method of the present invention is a method for producing a film laminated structure, including the steps of: (a) preparing a ceramic substrate; (b) charging a mold with a slurry that contains a raw material powder, a gelling agent containing at least two polymerizable organic compounds, and an organic solvent serving as a dispersion medium, and molding and hardening the slurry through a polymerization reaction of the gelling agent to form a green body having a recessed portion or through-hole; (c) inserting the ceramic substrate into the recessed portion or through-hole of the green body and then drying the ceramic substrate and the green body to form a green structure; and (d) firing the green structure to form a film laminated structure, the film laminated structure including a film formed from the green body by firing, wherein in the step (c), before drying, a clearance x [µm] between the recessed portion or through-hole of the green body and the ceramic substrate inserted into the recessed portion or through-hole of the green body and a volume percentage y [vol%] of the dispersion medium in the slurry satisfy the following formulae: 0 ‰¤ x ‰¤ 250, y ‰¥ 0.067x + 30, y ‰¤ 0.1x + 60, and y ‰¤ 70.