基本信息:
- 专利标题： Transducer
- 专利标题（中）：传感器
- 申请号：EP12170551.1 申请日：2012-06-01
- 公开(公告)号：EP2530954B1 公开(公告)日：2016-12-28
- 发明人： Dehe, Alfons
- 申请人： Infineon Technologies AG
- 申请人地址： Am Campeon 1-12 85579 Neubiberg DE
- 专利权人： Infineon Technologies AG
- 当前专利权人： Infineon Technologies AG
- 当前专利权人地址： Am Campeon 1-12 85579 Neubiberg DE
- 代理机构： Stöckeler, Ferdinand
- 优先权： US201113150972 20110601
- 主分类号： H04R19/00
- IPC分类号： H04R19/00
摘要：
A plate, a transducer, a method for making a transducer, and a method for operating a transducer are disclosed. An embodiment comprises a plate comprising a first material layer comprising a first stress, a second material layer arranged beneath the first material layer, the second material layer comprising a second stress, an opening arranged in the first material layer and the second material layer, and an extension extending into opening, wherein the extension comprises a portion of the first material layer and a portion of the second material layer, and wherein the extension is curved away from a top surface of the plate based on a difference in the first stress and the second stress.