
基本信息:
- 专利标题: Transmission electron microscope
- 专利标题(中):Transmissionselektronenmikroskop
- 申请号:EP08254110.3 申请日:2008-12-22
- 公开(公告)号:EP2073250A2 公开(公告)日:2009-06-24
- 发明人: Fukushima, Kurio
- 申请人: JEOL Ltd.
- 申请人地址: 1-2, Musashino 3-chome Akishima, Tokyo 196-8558 JP
- 专利权人: JEOL Ltd.
- 当前专利权人: JEOL Ltd.
- 当前专利权人地址: 1-2, Musashino 3-chome Akishima, Tokyo 196-8558 JP
- 代理机构: Cross, Rupert Edward Blount
- 优先权: JP2007329552 20071221
- 主分类号: H01J37/26
- IPC分类号: H01J37/26
摘要:
Apparatus for high-angle annular dark-field (HAADF) imaging without limiting the maximum tolerable pressure of gas introduced into the specimen chamber (7). The apparatus has an electron gun (2), a specimen chamber in which a specimen (5) is set, a gas cylinder (37) for supplying environmental gas to around the specimen surface through both a gas flow rate controller (39) and a gas nozzle (40), a vacuum pump (36) for evacuating the inside of the specimen chamber, an objective lens including upper and lower polepieces (8',9'), a detector (21,22,14,15) for detecting electrons transmitted through the specimen, a display device (19) for displaying a transmission image of the specimen based on the output signal from the detector, orifice plates (50) having minute holes (A-E), holders (51) supporting the orifice plates, a drive mechanism (52) for driving the holders, and a motion controller (53). The specimen is set between the upper and lower polepieces. The beam from the electron gun is transmitted through the objective lens. The orifice plates can be moved in a direction crossing the optical axis of the beam on the upper and lower surfaces of the upper and lower polepieces of the objective lens.
摘要(中):
用于大角度环形暗场(HAADF)成像的设备,而不限制引入样品室(7)的气体的最大可承受压力。 该装置具有电子枪(2),设有试样(5)的试样室,用于通过气体流量控制器(39)和气体流量控制器(39)向样品表面周围供给环境气体的气瓶(37) 气体喷嘴(40),用于抽空试样室内部的真空泵(36),包括上下杆(8',9')的物镜,检测器(21,22,14,15) 通过试样透射的电子,用于基于来自检测器的输出信号显示样本的透射图像的显示装置(19),具有微孔(AE)的孔板(50),支撑孔板的支架(51) 用于驱动保持器的驱动机构(52)和运动控制器(53)。 试样设置在上下杆之间。 来自电子枪的光束通过物镜透射。 孔板可以在与物镜的上下极的上表面和下表面上的光束的光轴交叉的方向上移动。
公开/授权文献:
- EP2073250B1 Transmission electron microscope 公开/授权日:2016-05-04
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01J | 放电管或放电灯 |
------H01J37/00 | 有把物质或材料引入使受到放电作用的结构的电子管,如为了对其检验或加工的 |
--------H01J37/26 | .电子或离子显微镜;电子或离子衍射管 |