发明公开
EP2004726A1 ORGANOSILANE POLYMERS, HARDMASK COMPOSITIONS INCLUDING THE SAME AND METHODS OF PRODUCING SEMICONDUCTOR DEVICES USING ORGANOSILANE HARDMASK COMPOSITIONS
审中-公开
基本信息:
- 专利标题： ORGANOSILANE POLYMERS, HARDMASK COMPOSITIONS INCLUDING THE SAME AND METHODS OF PRODUCING SEMICONDUCTOR DEVICES USING ORGANOSILANE HARDMASK COMPOSITIONS
- 专利标题（中）：ORGANOSILANPOLYMERE，含硅的硬掩模组合物及其制造方法半导体器件使用有机硅烷HART MASK组合物
- 申请号：EP07700795.3 申请日：2007-01-15
- 公开(公告)号：EP2004726A1 公开(公告)日：2008-12-24
- 发明人： YOON, Hui Chan , KIM, Sang Kyun , LIM, Sang Hak , UH, Dong Sun , KIM, Jong Seob , LEE, Jin Kuk , OH, Chang Il , KIM, Min Soo , YOON, Kyong Ho , NAM, Irina
- 申请人： Cheil Industries Inc.
- 申请人地址： 290 Gongdan 2-dong Gumi-si Gyeongsangbuk-do 730-710 KR
- 专利权人： Cheil Industries Inc.
- 当前专利权人： Cheil Industries Inc.
- 当前专利权人地址： 290 Gongdan 2-dong Gumi-si Gyeongsangbuk-do 730-710 KR
- 代理机构： Bublak, Wolfgang
- 优先权： KR20060022947 20060313; KR20060025922 20060322; KR20060026194 20060322; KR20060026204 20060322
- 国际公布： WO2007105859 20070920
- 主分类号： C08G77/00
- IPC分类号： C08G77/00 ; C08G77/02 ; C08G77/08 ; C08G77/06
摘要：
Provided herein, according to some embodiments of the invention, are organosilane polymers prepared by reacting organosilane compounds including (a) at least one compound of Formula I Si(OR 1 )(OR 2 )(OR 3 )R 4 (I) wherein R 1 , R 2 and R 3 may each independently be an alkyl group, and R 4 may be -(CH 2 ) n R 5 , wherein R 5 may be an aryl or a substituted aryl, and n may be 0 or a positive integer; and (b) at least one compound of Formula II Si(OR 6 )(OR 7 )(OR 8 )R 9 (II) wherein R 6 , R 7 and R 8 may each independently an alkyl group or an aryl group; and R 9 may be an alkyl group. Also provided are hardmask compositions including an organosilane compound according to an embodiment of the invention, or a hydrolysis product thereof. Methods of producing semiconductor devices using a hardmask compostion according to an embodiment of the invention, and semiconductor devices produced therefrom, are also provided.
IPC结构图谱:
| C | 化学；冶金 |
| --C08 | 有机高分子化合物；其制备或化学加工；以其为基料的组合物 |
| ----C08G | 用碳—碳不饱和键以外的反应得到的高分子化合物 |
| ------C08G77/00 | 在高分子主链中形成含硅键合，有或没有硫、氮、氧，或碳键合反应得到的高分子化合物 |