基本信息:
- 专利标题： Charged particle beam apparatus and method for operating it
- 申请号：EP06022329.4 申请日：2006-10-25
- 公开(公告)号：EP1916695B1 公开(公告)日：2018-12-05
- 发明人： Frosien, Jürgen , Banzhof, Helmut , Levin, Jacob , Shemesh, Dror
- 申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- 申请人地址： Ammerthalstrasse 20a 85551 Heimstetten DE
- 专利权人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- 当前专利权人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- 当前专利权人地址： Ammerthalstrasse 20a 85551 Heimstetten DE
- 代理机构： Zimmermann & Partner Patentanwälte mbB
- 主分类号： H01J37/28
- IPC分类号： H01J37/28 ; H01J37/244 ; H01J37/147
摘要：
A charged particle beam apparatus is provided, which comprises a charged particle beam column (2) for generating a primary charged particle beam (10); a focussing assembly, such as a charged particle lens, e.g. an electrostatic lens, for focussing the primary charged particle beam on a specimen (4); a detector (40) for detecting charged signal particles (18) which are emerging from the specimen (4); and a deflector arrangement (32) for deflecting the primary charged particle beam (10). The deflector arrangement (32) is arranged downstream of the focussing assembly and is adapted for allowing the charged signal particles (18) passing therethrough. The detector is laterally displaced with respect to the optical axis in a deflection direction defined by the post-focussing deflector arrangement.
公开/授权文献:
- EP1916695A1 Charged particle beam apparatus and method for operating it 公开/授权日：2008-04-30