
基本信息:
- 专利标题: CARBON FILM
- 专利标题(中):碳膜
- 申请号:EP06767832 申请日:2006-07-04
- 公开(公告)号:EP1911859A4 公开(公告)日:2009-08-05
- 发明人: HASEGAWA MASATAKA , TSUGAWA KAZUO , KOGA YOSHINORI , ISHIHARA MASATOU , IIJIMA SUMIO
- 申请人: NAT INST OF ADVANCED IND SCIEN
- 专利权人: NAT INST OF ADVANCED IND SCIEN
- 当前专利权人: NAT INST OF ADVANCED IND SCIEN
- 优先权: JP2005194628 2005-07-04
- 主分类号: C23C16/26
- IPC分类号: C23C16/26 ; C01B31/02 ; C03C17/22 ; C23C16/27
摘要:
A carbon film which has carbon particles having the same particle size as one another ranging from 1 to 1000 nm (preferably 2 to 200 nm) present substantially in the thickness direction of the film and which has an amorphous substance at least on the surface of each of the carbon particles at the interfaces and/or gaps between the carbon particles, the amorphous substance serving to prevent the formation of an impurity during the formation of the carbon particles and/or the growth of the carbon particles. The carbon film or the like retains a high transparency, has optical properties of a high refractive index and a low birefringence, is excellent in electrical insulation, is capable of being applied onto various substrates with good adhesion, and is also capable of being formed at a low temperature. Thus, the carbon film is extremely useful in an optical device, an optical glass, a wrist watch, an electronic circuit board, an abrasive tool or a protective film.